Inventor · disambiguated record
Chin-Ta Su
Also filed as: SU CHIN T · SU CHIN-TA
34 granted patents·22 pending applications·79 citations·filing 2002–2015
95Inventor score
Top patents by PatentIndex Score
56 records- 0196US8047899B2Pad and method for chemical mechanical polishingMACRONIX INT CO LTD·Filed 2007·Granted Nov 1, 2011·25 cites·5 claims
- 0267US6624023B1Method for improving the performance of flash memoryMACRONIX INT CO LTD·Filed 2002·Granted Sep 23, 2003·24 cites·19 claims
- 0366US8034691B2HDP-CVD process, filling-in process utilizing HDP-CVD, and HDP-CVD systemMACRONIX INT CO LTD·Filed 2008·Granted Oct 11, 2011·0 cites·9 claims
- 0465US7157331B2Ultraviolet blocking layerMACRONIX INT CO LTD·Filed 2004·Granted Jan 2, 2007·9 cites·23 claims
- 0556US7846835B2Contact barrier layer deposition processMACRONIX INT CO LTD·Filed 2007·Granted Dec 7, 2010·0 cites·39 claims
- 0656US7755197B2UV blocking and crack protecting passivation layerMACRONIX INT CO LTD·Filed 2006·Granted Jul 13, 2010·1 cites·11 claims
- 0756US7314813B2Methods of forming planarized multilevel metallization in an integrated circuitMACRONIX INT CO LTD·Filed 2004·Granted Jan 1, 2008·5 cites·18 claims
- 0855US7662712B2UV blocking and crack protecting passivation layer fabricating methodMACRONIX INT CO LTD·Filed 2006·Granted Feb 16, 2010·1 cites·12 claims
- 0955US7341910B2Method for forming a flash memory by using a microcrystalline polysilicon layer as a floating gateMACRONIX INT CO LTD·Filed 2002·Granted Mar 11, 2008·4 cites·6 claims
- 1055US6855617B1Method of filling intervals and fabricating shallow trench isolation structuresMACRONIX INT CO LTD·Filed 2003·Granted Feb 15, 2005·6 cites·22 claims
- 1154US8288280B2Conductor removal processHUNG YUNG-TAI·Filed 2007·Granted Oct 16, 2012·1 cites·10 claims
- 1254US2007080378A1Ultraviolet Blocking LayerMACRONIX INT CO LTD·Filed 2006·Application pending·0 cites
- 1353US8519541B2Semiconductor device having plural conductive layers disposed within dielectric layerLUOH TUUNG·Filed 2008·Granted Aug 27, 2013·0 cites·10 claims
- 1453US8520194B2Method of forming a deposited material by utilizing a multi-step deposition/etch/deposition (D/E/D) processLUOH TUUNG·Filed 2008·Granted Aug 27, 2013·0 cites·6 claims
- 1553US7235496B2HDPCVD process and method for improving uniformity of film thicknessMACRONIX INT CO LTD·Filed 2004·Granted Jun 26, 2007·1 cites·14 claims
- 1652US8184288B2Method of depositing a silicon-containing material by utilizing a multi-step fill-in process in a deposition machineLUOH TUUNG·Filed 2009·Granted May 22, 2012·0 cites·10 claims
- 1752US8085390B2Multivariate monitoring method for plasma process machineLUOH TUUNG·Filed 2007·Granted Dec 27, 2011·0 cites·9 claims
- 1852US8067292B2Isolation structure, non-volatile memory having the same, and method of fabricating the sameCHENG MING-DA·Filed 2008·Granted Nov 29, 2011·0 cites·22 claims
- 1952US2008132060A1Contact barrier layer deposition processMACRONIX INT CO LTD·Filed 2006·Application pending·0 cites
- 2051US2008132085A1Silicon Rich Dielectric Antireflective CoatingMACRONIX INT CO LTD·Filed 2008·Application pending·0 cites
- 2151US2014120735A1Semiconductor process gas flow control apparatusMACRONIX INT CO LTD·Filed 2012·Application pending·0 cites
- 2250US9252102B2Semiconductor structure and method for manufacturing the sameMACRONIX INT CO LTD·Filed 2014·Granted Feb 2, 2016·0 cites·12 claims
- 2350US7659167B2Method for improving the performance of flash memory by using microcrystalline silicon film as a floating gateMACRONIX INT CO LTD·Filed 2006·Granted Feb 9, 2010·0 cites·4 claims
- 2449US2011056432A1Contact barrier layer deposition processMACRONIX INT CO LTD·Filed 2010·Application pending·0 cites
- 2548US9070634B1Semiconductor device comprising a surface portion implanted with nitrogen and fluorineMACRONIX INT CO LTD·Filed 2013·Granted Jun 30, 2015·0 cites·21 claims
- 2648US6627501B2Method of forming tunnel oxide layerMACRONIX INT CO LTD·Filed 2002·Granted Sep 30, 2003·2 cites·4 claims
- 2748US2010244180A1Method for fabricating device isolation structureMACRONIX INT CO LTD·Filed 2009·Application pending·0 cites
- 2847US8653592B2Isolation structure, non-volatile memory having the same, and method of fabricating the sameCHENG MING-DA·Filed 2011·Granted Feb 18, 2014·0 cites·24 claims
- 2947US2012040532A1Pad and method for chemical mechanical polishingCHEN CHUN-FU·Filed 2011·Application pending·0 cites
- 3046US2009081859A1Metallization processMACRONIX INT CO LTD·Filed 2007·Application pending·0 cites
- 3146US2012000423A1Hdp-cvd systemLUOH TUUNG·Filed 2011·Application pending·0 cites
- 3245US7786023B2Metal pad formation method and metal pad structure using the sameMACRONIX INT CO LTD·Filed 2007·Granted Aug 31, 2010·0 cites·21 claims
- 3345US2008088827A1Method and apparatus of monitoring plasma process toolMACRONIX INT CO LTD·Filed 2006·Application pending·0 cites
- 3444US7625819B2Interconnection processMACRONIX INT CO LTD·Filed 2007·Granted Dec 1, 2009·0 cites·10 claims
- 3542US9431287B2Chemical mechanical planarization process and structuresMACRONIX INT CO LTD·Filed 2012·Granted Aug 30, 2016·0 cites·21 claims
- 3642US2007298583A1Method for forming a shallow trench isolation regionMACRONIX INT CO LTD·Filed 2006·Application pending·0 cites
- 3741US2006071301A1Silicon rich dielectric antireflective coatingLUO SHING A·Filed 2004·Application pending·0 cites
- 3840US7763517B2Method of forming non-volatile memory cellMACRONIX INT CO LTD·Filed 2007·Granted Jul 27, 2010·0 cites·11 claims
- 3940US2007128887A1Spin-on glass passivation processMACRONIX INT CO LTD·Filed 2005·Application pending·0 cites
- 4039US7144824B2Method for controlling the properties of DARC and manufacturing DARCMACRONIX INT CO LTD·Filed 2004·Granted Dec 5, 2006·0 cites·14 claims
- 4139US2006237802A1Method for improving SOG processMACRONIX INT CO LTD·Filed 2005·Application pending·0 cites
- 4239US2006292774A1Method for preventing metal line bridging in a semiconductor deviceMACRONIX INT CO LTD·Filed 2005·Application pending·0 cites
- 4338US6699796B2Single chip pad oxide layer growth processMACRONIX INT CO LTD·Filed 2002·Granted Mar 2, 2004·0 cites·15 claims
- 4438US2014015107A1Method to improve within wafer uniformity of cmp processCHEN CHING-KUN·Filed 2012·Application pending·0 cites
- 4537US9685373B2Conductive plug and method of forming the sameMACRONIX INT CO LTD·Filed 2015·Granted Jun 20, 2017·0 cites·5 claims
- 4637US8828861B2Method for fabricating conductive lines of a semiconductor deviceLUOH TUUNG·Filed 2010·Granted Sep 9, 2014·0 cites·14 claims
- 4737US2011275216A1Two step chemical-mechanical polishing processMACRONIX INT CO LTD·Filed 2010·Application pending·0 cites
- 4835US8580680B2Metal silicide formationLUOH TUUNG·Filed 2010·Granted Nov 12, 2013·0 cites·21 claims
- 4935US2005109608A1Method of improving thermal stability for cobalt salicideMACRONIX INT CO LTD·Filed 2003·Application pending·0 cites
- 5034US8445982B2Method of forming a semiconductor deviceYEH CHIN-TSAN·Filed 2011·Granted May 21, 2013·0 cites·11 claims
Showing the top 50 of 56 patent records by PatentIndex Score.
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