Inventor · disambiguated record
Tuung Luoh
Also filed as: LUOH TUUNG
35 granted patents·20 pending applications·58 citations·filing 2001–2023
95Inventor score
Top patents by PatentIndex Score
55 records- 0187US7382054B2Method for forming self-aligned contacts and local interconnects simultaneouslyMACRONIX INT CO LTD·Filed 2006·Granted Jun 3, 2008·14 cites·13 claims
- 0284US10388664B2Integrated circuit device with layered trench conductorsMACRONIX INT CO LTD·Filed 2018·Granted Aug 20, 2019·5 cites·17 claims
- 0382US9589086B2Method for measuring and analyzing surface structure of chip or waferMACRONIX INT CO LTD·Filed 2014·Granted Mar 7, 2017·5 cites·25 claims
- 0475US9006003B1Method of detecting bitmap failure associated with physical coordinateMACRONIX INT CO LTD·Filed 2014·Granted Apr 14, 2015·3 cites·19 claims
- 0575US7888804B2Method for forming self-aligned contacts and local interconnects simultaneouslyMACRONIX INT CO LTD·Filed 2008·Granted Feb 15, 2011·5 cites·8 claims
- 0670US7629265B2Cleaning method for use in semiconductor device fabricationMACRONIX INT CO LTD·Filed 2006·Granted Dec 8, 2009·3 cites·24 claims
- 0766US8034691B2HDP-CVD process, filling-in process utilizing HDP-CVD, and HDP-CVD systemMACRONIX INT CO LTD·Filed 2008·Granted Oct 11, 2011·0 cites·9 claims
- 0865US9116108B1Electron beam inspection optimizationMACRONIX INT CO LTD·Filed 2014·Granted Aug 25, 2015·1 cites·16 claims
- 0964US9244112B2Method for detecting an electrical defect of contact/via plugsMACRONIX INT CO LTD·Filed 2014·Granted Jan 26, 2016·1 cites·22 claims
- 1063US7498257B2Methods for metal ARC layer formationMACRONIX INT CO LTD·Filed 2006·Granted Mar 3, 2009·2 cites·8 claims
- 1162US7335610B2Ultraviolet blocking layerMACRONIX INT CO LTD·Filed 2005·Granted Feb 26, 2008·1 cites·36 claims
- 1260US2025089258A1Manufacturing method of memory device and manufacturing method of tungsten layerMACRONIX INT CO LTD·Filed 2023·Application pending·0 cites
- 1358US8383515B2Methodology for wordline short reductionMACRONIX INT CO LTD·Filed 2010·Granted Feb 26, 2013·1 cites·10 claims
- 1456US7846835B2Contact barrier layer deposition processMACRONIX INT CO LTD·Filed 2007·Granted Dec 7, 2010·0 cites·39 claims
- 1556US7045419B2Elimination of the fast-erase phenomena in flash memoryMACRONIX INT CO LTD·Filed 2003·Granted May 16, 2006·7 cites·22 claims
- 1655US8594963B2In-line inspection yield prediction systemLIAO HSIANG-CHOU·Filed 2010·Granted Nov 26, 2013·1 cites·18 claims
- 1753US8519541B2Semiconductor device having plural conductive layers disposed within dielectric layerLUOH TUUNG·Filed 2008·Granted Aug 27, 2013·0 cites·10 claims
- 1853US8520194B2Method of forming a deposited material by utilizing a multi-step deposition/etch/deposition (D/E/D) processLUOH TUUNG·Filed 2008·Granted Aug 27, 2013·0 cites·6 claims
- 1952US8184288B2Method of depositing a silicon-containing material by utilizing a multi-step fill-in process in a deposition machineLUOH TUUNG·Filed 2009·Granted May 22, 2012·0 cites·10 claims
- 2052US8085390B2Multivariate monitoring method for plasma process machineLUOH TUUNG·Filed 2007·Granted Dec 27, 2011·0 cites·9 claims
- 2152US8067292B2Isolation structure, non-volatile memory having the same, and method of fabricating the sameCHENG MING-DA·Filed 2008·Granted Nov 29, 2011·0 cites·22 claims
- 2252US2008132060A1Contact barrier layer deposition processMACRONIX INT CO LTD·Filed 2006·Application pending·0 cites
- 2350US10892265B2Word line structure and method of manufacturing the sameMACRONIX INT CO LTD·Filed 2019·Granted Jan 12, 2021·0 cites·19 claims
- 2450US8329480B2Test pattern for detecting piping in a memory arrayHUNG CHE-LUN·Filed 2010·Granted Dec 11, 2012·2 cites·17 claims
- 2550US7148105B2Method for forming polysilicon floating gateMACRONIX INT CO LTD·Filed 2004·Granted Dec 12, 2006·3 cites·33 claims
- 2650US6962861B2Method of forming a polysilicon layer comprising microcrystalline grainsMACRONIX INT CO LTD·Filed 2003·Granted Nov 8, 2005·4 cites·19 claims
- 2749US2011056432A1Contact barrier layer deposition processMACRONIX INT CO LTD·Filed 2010·Application pending·0 cites
- 2848US7938972B2Fabrication method of electronic deviceMACRONIX INT CO LTD·Filed 2007·Granted May 10, 2011·0 cites·24 claims
- 2947US10497652B1Semiconductor substrate and semiconductor deviceMACRONIX INT CO LTD·Filed 2018·Granted Dec 3, 2019·0 cites·17 claims
- 3047US8653592B2Isolation structure, non-volatile memory having the same, and method of fabricating the sameCHENG MING-DA·Filed 2011·Granted Feb 18, 2014·0 cites·24 claims
- 3147US8003519B2Systems and methods for back end of line processing of semiconductor circuitsMACRONIX INT CO LTD·Filed 2007·Granted Aug 23, 2011·0 cites·33 claims
- 3246US7951707B2Etching method for semiconductor elementMACRONIX INT CO LTD·Filed 2007·Granted May 31, 2011·0 cites·21 claims
- 3346US2009081859A1Metallization processMACRONIX INT CO LTD·Filed 2007·Application pending·0 cites
- 3446US2012000423A1Hdp-cvd systemLUOH TUUNG·Filed 2011·Application pending·0 cites
- 3544US7625819B2Interconnection processMACRONIX INT CO LTD·Filed 2007·Granted Dec 1, 2009·0 cites·10 claims
- 3644US7517780B2Method for eliminating polycide voids through nitrogen implantationMACRONIX INT CO LTD·Filed 2005·Granted Apr 14, 2009·0 cites·9 claims
- 3744US2007293034A1Unlanded via process without plasma damageMACRONIX INT CO LTD·Filed 2006·Application pending·0 cites
- 3843US9869712B2Method and system for detecting defects of wafer by wafer sortMACRONIX INT CO LTD·Filed 2015·Granted Jan 16, 2018·0 cites·27 claims
- 3943US2015110384A1Image inspection method of die to databaseMACRONIX INT CO LTD·Filed 2014·Application pending·0 cites
- 4043US2008119044A1Systems and methods for back end of line processing of semiconductor circuitsMACRONIX INT CO LTD·Filed 2006·Application pending·0 cites
- 4143US2016123905A1Inspection of inconsistencies in and on semiconductor devices and structuresMACRONIX INT CO LTD·Filed 2014·Application pending·0 cites
- 4242US2016110859A1Inspection method for contact by die to databaseMACRONIX INT CO LTD·Filed 2014·Application pending·0 cites
- 4341US8669184B2Method for improving flatness of a layer deposited on polycrystalline layerLUOH TUUNG·Filed 2011·Granted Mar 11, 2014·0 cites·6 claims
- 4438US2018337140A13d integrated circuit device having a buttress structure for resisting deformationMACRONIX INT CO LTD·Filed 2017·Application pending·0 cites
- 4537US8828861B2Method for fabricating conductive lines of a semiconductor deviceLUOH TUUNG·Filed 2010·Granted Sep 9, 2014·0 cites·14 claims
- 4637US2004007733A1Floating gate memory cell and forming methodMACRONIX INT CO LTD·Filed 2002·Application pending·0 cites
- 4737US2016365253A1System and method for chemical mechanical planarization process prediction and optimizationMACRONIX INT CO LTD·Filed 2015·Application pending·0 cites
- 4835US8580680B2Metal silicide formationLUOH TUUNG·Filed 2010·Granted Nov 12, 2013·0 cites·21 claims
- 4935US2018269222A13d memory device with layered conductorsMACRONIX INT CO LTD·Filed 2017·Application pending·0 cites
- 5033US2017076976A1Isolation structure and method for fabricating the sameMACRONIX INT CO LTD·Filed 2015·Application pending·0 cites
Showing the top 50 of 55 patent records by PatentIndex Score.
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