Inventor · disambiguated record
Marcus Serwazi
Also filed as: SERWAZI MARCUS
6 granted patents·1 pending application·123 citations·filing 2001–2013
85Inventor score
Top patents by PatentIndex Score
7 records- 0191US6563853B2Gas performance control system for gas discharge lasersLAMBDA PHYSIK AG·Filed 2001·Granted May 13, 2003·46 cites·59 claims
- 0282US6700916B1E-diagnostic, laser simulator, automated testing and deconvolution of spectra for lithographic exposure radiation generating systems such as excimer or molecular fluorine laser or EUV source systemsLAMBDA PHYSIK AG·Filed 2002·Granted Mar 2, 2004·23 cites·1 claims
- 0379US6735225B2Chirp compensation method and apparatusLAMBDA PHYSIK AG·Filed 2002·Granted May 11, 2004·18 cites·13 claims
- 0475US6760358B1Line-narrowing optics module having improved mechanical performanceLAMBDA PHYSIK AG·Filed 2002·Granted Jul 6, 2004·15 cites·40 claims
- 0575US6549555B2Gas performance control system for gas discharge lasersLAMBDA PHYSIK AG·Filed 2001·Granted Apr 15, 2003·14 cites·43 claims
- 0663US6597462B2Laser wavelength and bandwidth monitorLAMBDA PHYSIK AG·Filed 2001·Granted Jul 22, 2003·7 cites·13 claims
- 0737US2015109663A1DLC Coating for an Optical IR Component and Optical IR Component Having Said DLC CoatingJENOPTIK OPTICAL SYS GMBH·Filed 2013·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →