Inventor · disambiguated record
William R. Bartlett
Also filed as: BARTLETT WILLIAM · BARTLETT WILLIAM R
7 granted patents·270 citations·filing 1995–2000
88Inventor score
Files withAPPLIED MATERIALS INC7
Top patents by PatentIndex Score
7 records- 0188US5775983AApparatus and method for conditioning a chemical mechanical polishing padAPPLIED MATERIALS INC·Filed 1995·Granted Jul 7, 1998·82 cites·27 claims
- 0287US5951373ACircumferentially oscillating carousel apparatus for sequentially processing substrates for polishing and cleaningAPPLIED MATERIALS INC·Filed 1995·Granted Sep 14, 1999·62 cites·7 claims
- 0384US5899801AMethod and apparatus for removing a substrate from a polishing pad in a chemical mechanical polishing systemAPPLIED MATERIALS INC·Filed 1996·Granted May 4, 1999·65 cites·13 claims
- 0478US6136715ACircumferentially oscillating carousel apparatus for sequentially polishing substratesAPPLIED MATERIALS INC·Filed 1999·Granted Oct 24, 2000·33 cites·10 claims
- 0575US6506099B1Driving a carrier head in a wafer polishing systemAPPLIED MATERIALS INC·Filed 2000·Granted Jan 14, 2003·17 cites·21 claims
- 0662US6350188B1Drive system for a carrier head support structureAPPLIED MATERIALS INC·Filed 2000·Granted Feb 26, 2002·9 cites·19 claims
- 0748US6245680B1Circumferentially oscillating carousel apparatus for sequentially processing substrates for polishing and cleaningAPPLIED MATERIALS INC·Filed 2000·Granted Jun 12, 2001·2 cites·22 claims
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