Inventor · disambiguated record
Tsu-Wu Chiang
Also filed as: CHIANG TSU-WU
3 granted patents·1 pending application·4 citations·filing 2017–2023
59Inventor score
Technology areasH10P
Files withPLASMA THERM LLC4
Top patents by PatentIndex Score
4 records- 0184US10818552B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2019·Granted Oct 27, 2020·3 cites·26 claims
- 0271US10269641B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2017·Granted Apr 23, 2019·1 cites·26 claims
- 0366US11651999B2Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2020·Granted May 16, 2023·0 cites·23 claims
- 0453US2023253252A1Method and apparatus for plasma dicing a semi-conductor waferPLASMA THERM LLC·Filed 2023·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →