Inventor · disambiguated record
Haejoong Park
Also filed as: PARK HAEJOONG
5 granted patents·1 citations·filing 2015–2024
61Inventor score
Files withSAMSUNG ELECTRONICS CO LTD5
Top patents by PatentIndex Score
5 records- 0169US12211672B2Apparatus and method for plasma etchingSAMSUNG ELECTRONICS CO LTD·Filed 2024·Granted Jan 28, 2025·0 cites·11 claims
- 0259US11984304B2Apparatus and method for plasma etchingSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted May 14, 2024·0 cites·17 claims
- 0358US9912258B2Electrostatic chuck assemblies capable of bidirectional flow of coolant and semiconductor fabricating apparatus having the sameSAMSUNG ELECTRONICS CO LTD·Filed 2015·Granted Mar 6, 2018·1 cites·20 claims
- 0442US11430679B2Semiconductor manufacturing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Aug 30, 2022·0 cites·18 claims
- 0536US9870900B2Methods and systems for managing semiconductor manufacturing equipmentSAMSUNG ELECTRONICS CO LTD·Filed 2015·Granted Jan 16, 2018·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →