Inventor · disambiguated record
Karena Shannon
Also filed as: SHANNON KARENA · SHANNON KARENA LYNN
2 granted patents·2 pending applications·52 citations·filing 2011–2020
65Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0194US8846536B2Flowable oxide film with tunable wet etch rateDRAEGER NERISSA·Filed 2012·Granted Sep 30, 2014·42 cites·22 claims
- 0290US9299559B2Flowable oxide film with tunable wet etch rateNOVELLUS SYSTEMS INC·Filed 2014·Granted Mar 29, 2016·10 cites·14 claims
- 0339US2022238354A1Multiple vacuum chamber exhaust system and method of evacuating multiple chambersEDWARDS VACUUM LLC·Filed 2020·Application pending·0 cites
- 0434US2012149213A1Bottom up fill in high aspect ratio trenchesNITTALA LAKSHMINARAYANA·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →