Inventor · disambiguated record
Diethard Kloepfel
Also filed as: KLOEPFEL DIETHARD
4 granted patents·57 citations·filing 2005–2010
77Inventor score
Technology areasH05G
Top patents by PatentIndex Score
4 records- 0183US7599470B2Arrangement for generating extreme ultraviolet radiation from a plasma generated by an energy beam with high conversion efficiency and minimum contaminationXTREME TECH GMBH·Filed 2007·Granted Oct 6, 2009·22 cites·22 claims
- 0278US8154000B2Arrangement for the continuous generation of liquid tin as emitter material in EUV radiation sourcesHERGENHAN GUIDO·Filed 2010·Granted Apr 10, 2012·13 cites·23 claims
- 0375US7372057B2Arrangement for providing a reproducible target flow for the energy beam-induced generation of short-wavelength electromagnetic radiationXTREME TECH GMBH·Filed 2005·Granted May 13, 2008·12 cites·25 claims
- 0471US7368742B2Arrangement and method for metering target material for the generation of short-wavelength electromagnetic radiationXTREME TECH GMBH·Filed 2005·Granted May 6, 2008·10 cites·33 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →