Inventor · disambiguated record
Cozy Ban
Also filed as: BAN COZY
19 granted patents·1 pending application·659 citations·filing 1992–2002
96Inventor score
Top patents by PatentIndex Score
20 records- 0191US5216890ADevice for and method of producing hyperfine frozen particlesMITSUBISHI ELECTRIC CORP·Filed 1992·Granted Jun 8, 1993·65 cites·10 claims
- 0290US6001215ASemiconductor nitride film etching systemMITSUBISHI ELECTRIC CORP·Filed 1996·Granted Dec 14, 1999·104 cites·15 claims
- 0388US5380471AAeration apparatus for producing ultrapure waterMITSUBISHI ELECTRIC CORP·Filed 1994·Granted Jan 10, 1995·75 cites·5 claims
- 0484US6145519ASemiconductor workpiece cleaning method and apparatusMITSUBISHI ELECTRIC CORP·Filed 1997·Granted Nov 14, 2000·67 cites·19 claims
- 0578US6227212B1Semiconductor workpiece cleaning method and apparatusMITSUBISHI ELECTRIC CORP·Filed 2000·Granted May 8, 2001·20 cites·19 claims
- 0674US5470461AApparatus for producing pure waterMITSUBISHI ELECTRIC CORP·Filed 1992·Granted Nov 28, 1995·35 cites·15 claims
- 0773US5956859ADrying apparatus for processing surface of substrateRYODEN SEMICONDUCTOR SYST ENG·Filed 1997·Granted Sep 28, 1999·45 cites·18 claims
- 0873US5336356AApparatus for treating the surface of a semiconductor substrateMITSUBISHI ELECTRIC CORP·Filed 1992·Granted Aug 9, 1994·55 cites·4 claims
- 0970US5246586AApparatus and method for producing ultrapure water and method of controlling the apparatusMITSUBISHI ELECTRIC CORP·Filed 1992·Granted Sep 21, 1993·32 cites·15 claims
- 1066US6032382ADrying apparatus and method using IPA of a semiconductor waferMITSUBISHI ELECTRIC CORP·Filed 1997·Granted Mar 7, 2000·33 cites·15 claims
- 1163US6131052ASemiconductor manufacturing non-processing apparatuses with storage equipmentMITSUBISHI ELECTRIC CORP·Filed 1997·Granted Oct 10, 2000·29 cites·18 claims
- 1255US6431183B1Method for treating semiconductor substratesMITSUBISHI ELECTRIC CORP·Filed 1998·Granted Aug 13, 2002·21 cites·12 claims
- 1353US6562205B1High-temperature ultrapure water production apparatus and liquid medicine preparation apparatus equipped with the production apparatusMITSUBISHI ELECTRIC CORP·Filed 1998·Granted May 13, 2003·19 cites·8 claims
- 1453US5554295AMethod for producing pure waterMITSUBISHI ELECTRIC CORP·Filed 1995·Granted Sep 10, 1996·16 cites·4 claims
- 1546US5468350AApparatus for manufacturing ultrapure waterMITSUBISHI ELECTRIC CORP·Filed 1993·Granted Nov 21, 1995·10 cites·6 claims
- 1643US6410454B1Method and apparatus for removing contaminants from the surface of a semiconductor waferMITSUBISHI ELECTRIC CORP·Filed 1997·Granted Jun 25, 2002·13 cites·7 claims
- 1739US5996242ADrying apparatus and methodRYODEN SEMICONDUCTOR SYST ENG·Filed 1997·Granted Dec 7, 1999·8 cites·20 claims
- 1838US6221771B1Method of forming tungsten silicide film, method of fabricating semiconductor devices and semiconductor manufactured therebyMITSUBISHI ELECTRIC CORP·Filed 1998·Granted Apr 24, 2001·5 cites·20 claims
- 1937US2003006135A1Plating apparatus and plating method, and method of manufacturing semiconductor deviceMITSUBISHI ELECTRIC CORP·Filed 2002·Application pending·0 cites
- 2032US5344615AWet-process apparatusMITSUBISHI ELECTRIC CORP·Filed 1993·Granted Sep 6, 1994·7 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →