Inventor · disambiguated record
William Marx
Also filed as: MARX WILLIAM · MARX WILLIAM F · PARTLO WILLIAM N
5 granted patents·329 citations·filing 2004–2022
82Inventor score
Top patents by PatentIndex Score
5 records- 0199US7196342B2Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light sourceCYMER INC·Filed 2005·Granted Mar 27, 2007·284 cites·9 claims
- 0284US7355191B2Systems and methods for cleaning a chamber window of an EUV light sourceCYMER INC·Filed 2005·Granted Apr 8, 2008·20 cites·23 claims
- 0382US7732793B2Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light sourceCYMER INC·Filed 2007·Granted Jun 8, 2010·14 cites·7 claims
- 0467US8075732B2EUV collector debris managementPARTLO WILLIAM N·Filed 2004·Granted Dec 13, 2011·11 cites·21 claims
- 0558US12033268B2Volumetric dynamic depth delineationINTUITIVE RESEARCH AND TECH CORPORATION·Filed 2022·Granted Jul 9, 2024·0 cites·22 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →