Inventor · disambiguated record
Alfred Kersch
Also filed as: KERSCH ALFRED
12 granted patents·10 pending applications·210 citations·filing 1994–2008
91Inventor score
Top patents by PatentIndex Score
22 records- 0195US6458603B1Method of fabricating a micro-technical structure, and micro-technical componentINFINEON TECHNOLOGIES AG·Filed 2001·Granted Oct 1, 2002·104 cites·9 claims
- 0287US6524448B2Configuration for the execution of a plasma based sputter processINFINEON TECHNOLOGIES AG·Filed 2001·Granted Feb 25, 2003·35 cites·11 claims
- 0366US7022209B2PVD method and PVD apparatusINFINEON TECHNOLOGIES AG·Filed 2003·Granted Apr 4, 2006·10 cites·30 claims
- 0463US5505833AMethod for depositing a layer on a substrate wafer with a sputtering processSIEMENS AG·Filed 1994·Granted Apr 9, 1996·16 cites·13 claims
- 0560US7316933B2Method for producing an annular microstructure elementINFINEON TECHNOLOGIES AG·Filed 2005·Granted Jan 8, 2008·2 cites·17 claims
- 0660US6716748B2Reaction chamber for processing a substrate wafer, and method for processing a substrate using the chamberINFINEON TECHNOLOGIES AG·Filed 2002·Granted Apr 6, 2004·4 cites·10 claims
- 0759US6649521B2Method for determining the relevant ion and particle flows in i-PVD processesINFINEON TECHNOLOGIES AG·Filed 2002·Granted Nov 18, 2003·4 cites·16 claims
- 0858US6413886B1Method for fabricating a microtechnical structureINFINEON TECHNOLOGIES AG·Filed 2000·Granted Jul 2, 2002·8 cites·15 claims
- 0952US5998767AApparatus for processing a substrate wafer and method for operating sameSIEMENS AG·Filed 1998·Granted Dec 7, 1999·18 cites·10 claims
- 1051US6579758B2Method and installation for fabricating one-sided buried strapsINFINEON TECHNOLOGIES AG·Filed 2002·Granted Jun 17, 2003·3 cites·8 claims
- 1149US2007269598A1Method, apparatus and starting material for providing a gaseous precursorKERSCH ALFRED·Filed 2007·Application pending·0 cites
- 1247US6660637B2Process for chemical mechanical polishingINFINEON TECHNOLOGIES AG·Filed 2001·Granted Dec 9, 2003·4 cites·19 claims
- 1344US2008176375A1Method for forming a dielectric layerQIMONDA AG·Filed 2008·Application pending·0 cites
- 1443US6977405B2Semiconductor memory with memory cells comprising a vertical selection transistor and method for fabricating itINFINEON TECHNOLOGIES AG·Filed 2004·Granted Dec 20, 2005·2 cites·10 claims
- 1539US2007161180A1Automatic layer deposition processINFINEON TECHNOLOGIES AG·Filed 2006·Application pending·0 cites
- 1637US2009204936A1Method of Performing Proximity CorrectionJACOBS WERNER·Filed 2008·Application pending·0 cites
- 1737US2008085606A1Method for Fabricating a Structure for a Semiconductor Component, and Semiconductor ComponentFISCHER DOMINIK·Filed 2007·Application pending·0 cites
- 1836US2009102023A1Method for Manufacturing a Structure, Semiconductor Device and Structure on a SubstrateWEGE STEPHAN·Filed 2007·Application pending·0 cites
- 1935US2008182344A1Method and system for determining deformations on a substrateMUELLER STEFFEN·Filed 2007·Application pending·0 cites
- 2033US2005016468A1Compensation frame for receiving a substrateFiled 2003·Application pending·0 cites
- 2133US2002025377A1Method of producing a ferroelectric solid-state layer using an auxiliary substanceFiled 2001·Application pending·0 cites
- 2227US2003019837A1Method and apparatus for producing at least one depression in a semiconductor materialFiled 2002·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Alfred Kersch files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →