Inventor · disambiguated record
Kyungseok Ko
Also filed as: KO KYUNGSEOK
5 granted patents·2 citations·filing 2018–2019
63Inventor score
Files withTOKYO ELECTRON LTD5
Top patents by PatentIndex Score
5 records- 0170US10964530B2Method of forming blocking silicon oxide film, and storage mediumTOKYO ELECTRON LTD·Filed 2018·Granted Mar 30, 2021·1 cites·10 claims
- 0269US10553686B2Method and apparatus for forming silicon oxide film, and storage mediumTOKYO ELECTRON LTD·Filed 2018·Granted Feb 4, 2020·1 cites·16 claims
- 0358US10636649B2Method and apparatus for forming silicon oxide film on tungsten filmTOKYO ELECTRON LTD·Filed 2018·Granted Apr 28, 2020·0 cites·11 claims
- 0449US10781515B2Film-forming method and film-forming apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Sep 22, 2020·0 cites·11 claims
- 0542US10968515B2Vertical heat treatment apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Apr 6, 2021·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →