Inventor · disambiguated record
Jan Bernard Plechelmus Van Schoot
Also filed as: VAN SCHOOT JAN · VAN SCHOOT JAN BERNARD PLECHEL · VAN SCHOOT JAN BERNARD PLECHELMUS
51 granted patents·4 pending applications·240 citations·filing 2002–2021
97Inventor score
Files withASML NETHERLANDS BV24VAN SCHOOT JAN BERNARD PLECHELMUS6ZEISS CARL SMT GMBH6LOOPSTRA ERIK ROELOF3BANINE VADIM YEVGENYEVICH2
Top patents by PatentIndex Score
55 records- 0196US6737662B2Lithographic apparatus, device manufacturing method, device manufactured thereby, control system, computer program, and computer program productASML NETHERLANDS BV·Filed 2002·Granted May 18, 2004·109 cites·23 claims
- 0291US9316929B2EUV exposure apparatus with reflective elements having reduced influence of temperature variationZEISS CARL SMT GMBH·Filed 2013·Granted Apr 19, 2016·10 cites·22 claims
- 0391US8730448B2Lithographic apparatus and device manufacturing methodNIENHUYS HAN-KWANG·Filed 2012·Granted May 20, 2014·9 cites·19 claims
- 0490US10031423B2EUV exposure apparatus with reflective elements having reduced influence of temperature variationZEISS CARL SMT GMBH·Filed 2017·Granted Jul 24, 2018·4 cites·20 claims
- 0590US9052605B2Illumination system for lithographic apparatus with control system to effect an adjustment of an imaging parameterVAN INGEN SCHENAU KOEN·Filed 2010·Granted Jun 9, 2015·10 cites·25 claims
- 0690US7352435B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Apr 1, 2008·26 cites·22 claims
- 0785US9170500B2Lithographic apparatus and device manufacturing method with corrective positioning of reflective elementVAN SCHOOT JAN BERNARD PLECHELMUS·Filed 2010·Granted Oct 27, 2015·10 cites·10 claims
- 0885US7961293B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2008·Granted Jun 14, 2011·5 cites·25 claims
- 0981US9785051B2Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devicesASML NETHERLANDS BV·Filed 2013·Granted Oct 10, 2017·5 cites·29 claims
- 1081US8896809B2Lithographic apparatus and device manufacturing methodSTOELDRAIJER JUDOCUS MARIE DOMINICUS·Filed 2007·Granted Nov 25, 2014·9 cites·21 claims
- 1177US9618859B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Apr 11, 2017·2 cites·20 claims
- 1276US9411238B2Source-collector device, lithographic apparatus, and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Aug 9, 2016·4 cites·8 claims
- 1375US9986628B2Method and apparatus for generating radiationASML NETHERLANDS BV·Filed 2013·Granted May 29, 2018·2 cites·15 claims
- 1474US9835950B2Radiation sourceASML NETHERLANDS BV·Filed 2014·Granted Dec 5, 2017·4 cites·24 claims
- 1573US9372413B2Optical apparatus for conditioning a radiation beam for use by an object, lithography apparatus and method of manufacturing devicesDE VRIES GOSSE CHARLES·Filed 2012·Granted Jun 21, 2016·2 cites·20 claims
- 1670US7889321B2Illumination system for illuminating a patterning device and method for manufacturing an illumination systemASML NETHERLANDS BV·Filed 2007·Granted Feb 15, 2011·2 cites·24 claims
- 1769US9164401B2Projection system and lithographic apparatusLOOPSTRA ERIK ROELOF·Filed 2009·Granted Oct 20, 2015·2 cites·23 claims
- 1868US10684551B2EUV exposure apparatus with reflective elements having reduced influence of temperature variationZEISS CARL SMT GMBH·Filed 2019·Granted Jun 16, 2020·0 cites·9 claims
- 1967US8797504B2Lithographic apparatus and device manufacturing methodNIENHUYS HAN-KWANG·Filed 2012·Granted Aug 5, 2014·1 cites·19 claims
- 2065US8115900B2Lithographic apparatus and device manufacturing methodVAN DE VIJVER YURI JOHANNES GABRIEL·Filed 2007·Granted Feb 14, 2012·6 cites·23 claims
- 2163US10317802B2EUV exposure apparatus with reflective elements having reduced influence of temperature variationZEISS CARL SMT GMBH·Filed 2018·Granted Jun 11, 2019·0 cites·21 claims
- 2263US10248027B2Projection systemASML NETHERLANDS BV·Filed 2015·Granted Apr 2, 2019·1 cites·21 claims
- 2362US9285685B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Mar 15, 2016·0 cites·20 claims
- 2461US9632419B2Radiation sourceVAN SCHOOT JAN BERNARD PLECHELMUS·Filed 2012·Granted Apr 25, 2017·2 cites·23 claims
- 2558US9746778B2EUV exposure apparatus with reflective elements having reduced influence of temperature variationZEISS CARL SMT GMBH·Filed 2016·Granted Aug 29, 2017·0 cites·14 claims
- 2657US7374869B2Lithographic processing method and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Granted May 20, 2008·5 cites·22 claims
- 2756US12099306B2Method for controlling a lithographic systemASML NETHERLANDS BV·Filed 2020·Granted Sep 24, 2024·0 cites·12 claims
- 2856US11327403B2Illumination optical system for projection lithographyZEISS CARL SMT GMBH·Filed 2021·Granted May 10, 2022·0 cites·20 claims
- 2956US8901521B2Module and method for producing extreme ultraviolet radiationVAN EMPEL TJARKO ADRIAAN RUDOLF·Filed 2008·Granted Dec 2, 2014·3 cites·31 claims
- 3056US8711330B2Lithographic apparatus and device manufacturing methodSTREEFKERK BOB·Filed 2011·Granted Apr 29, 2014·0 cites·14 claims
- 3155US10001709B2Lithographic apparatus, spectral purity filter and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Jun 19, 2018·0 cites·18 claims
- 3255US8704199B2Alignment of collector device in lithographic apparatusKLAASSEN MICHEL FRANSOIS HUBERT·Filed 2009·Granted Apr 22, 2014·2 cites·19 claims
- 3354US7177010B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Feb 13, 2007·3 cites·30 claims
- 3453US10289006B2Beam delivery for EUV lithographyASML NETHERLANDS BV·Filed 2013·Granted May 14, 2019·0 cites·19 claims
- 3553US9363879B2Module and method for producing extreme ultraviolet radiationASML NETHERLANDS BV·Filed 2014·Granted Jun 7, 2016·0 cites·19 claims
- 3653US9097982B2Radiation system, radiation collector, radiation beam conditioning system, spectral purity filter for radiation system and method for forming a spectral purity filterBANINE VADIM YEVGENYEVICH·Filed 2009·Granted Aug 4, 2015·0 cites·20 claims
- 3752US9860966B2Radiation sourceASML NETHERLANDS BV·Filed 2013·Granted Jan 2, 2018·0 cites·18 claims
- 3851US2009262328A1Illumination system and lithographic methodASML NETHERLANDS BV·Filed 2009·Application pending·0 cites
- 3950US9989863B2Lithographic systemASML NETHERLANDS BV·Filed 2015·Granted Jun 5, 2018·0 cites·27 claims
- 4048US9958787B2Lithographic method and apparatusASML NETHERLANDS BV·Filed 2013·Granted May 1, 2018·0 cites·19 claims
- 4148US8570489B2Lithographic projection apparatus and method of compensating perturbation factorsVAN SCHOOT JAN BERNARD PLECHELMUS·Filed 2008·Granted Oct 29, 2013·0 cites·24 claims
- 4247US9594306B2Lithographic apparatus, spectral purity filter and device manufacturing methodBANINE VADIM YEVGENYEVICH·Filed 2011·Granted Mar 14, 2017·0 cites·17 claims
- 4346US9414477B2Radiation source, lithographic apparatus and device manufacturing methodLOOPSTRA ERIK ROELOF·Filed 2009·Granted Aug 9, 2016·1 cites·16 claims
- 4445US8830444B2Lithographic apparatus and methodVAN SCHOOT JAN BERNARD PLECHELMUS·Filed 2011·Granted Sep 9, 2014·0 cites·15 claims
- 4544US8749756B2Lithographic apparatus and device manufacturing methodVAN DE VIJVER YURI JOHANNES GABRIEL·Filed 2012·Granted Jun 10, 2014·0 cites·20 claims
- 4644US7816658B2Extreme ultra-violet lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2007·Granted Oct 19, 2010·0 cites·19 claims
- 4743US9134629B2Illumination system, lithographic apparatus and method of forming an illumination modeLOOPSTRA ERIK ROELOF·Filed 2010·Granted Sep 15, 2015·0 cites·24 claims
- 4841US8867021B2Illumination system, lithographic apparatus and method of adjusting an illumination modeDE VRIES GOSSE CHARLES·Filed 2010·Granted Oct 21, 2014·0 cites·19 claims
- 4941US7199861B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Apr 3, 2007·1 cites·32 claims
- 5040US2013077073A1Methods to control euv exposure dose and euv lithographic methods and apparatus using such methodsVAN SCHOOT JAN BERNARD PLECHELMUS·Filed 2012·Application pending·0 cites
Showing the top 50 of 55 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →