Inventor · disambiguated record
Michiel Kupers
Also filed as: KUPERS MICHIEL
12 granted patents·1 pending application·38 citations·filing 2008–2023
87Inventor score
Top patents by PatentIndex Score
13 records- 0196US10281825B2Method of sequencing lots for a lithographic apparatusASML NETHERLANDS BV·Filed 2017·Granted May 7, 2019·16 cites·20 claims
- 0295US11774862B2Method of obtaining measurements, apparatus for performing a process step, and metrology apparatusASML NETHERLANDS BV·Filed 2021·Granted Oct 3, 2023·4 cites·20 claims
- 0385US12044981B2Method and apparatus for optimization of lithographic processASML NETHERLANDS BV·Filed 2021·Granted Jul 23, 2024·1 cites·20 claims
- 0481US11782349B2Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatusASML NETHERLANDS BV·Filed 2023·Granted Oct 10, 2023·0 cites·20 claims
- 0581US8440475B2Alignment calculationHABETS BORIS·Filed 2008·Granted May 14, 2013·7 cites·15 claims
- 0678US7783444B2Systems and methods of alternative overlay calculationQIMONDA AG·Filed 2008·Granted Aug 24, 2010·7 cites·21 claims
- 0777US11592753B2Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatusASML NETHERLANDS BV·Filed 2022·Granted Feb 28, 2023·0 cites·20 claims
- 0877US11175591B2Method of obtaining measurements, apparatus for performing a process step, and metrology apparatusASML NETHERLANDS BV·Filed 2017·Granted Nov 16, 2021·2 cites·24 claims
- 0977US10877381B2Methods of determining corrections for a patterning processASML NETHERLANDS BV·Filed 2017·Granted Dec 29, 2020·1 cites·20 claims
- 1072US11327407B2Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatusASML NETHERLANDS BV·Filed 2020·Granted May 10, 2022·0 cites·20 claims
- 1158US11099487B2Method and apparatus for optimization of lithographic processASML NETHERLANDS BV·Filed 2018·Granted Aug 24, 2021·0 cites·21 claims
- 1240US2020050180A1Methods & apparatus for controlling an industrial processASML NETHERLANDS BV·Filed 2017·Application pending·0 cites
- 1338US10908512B2Methods of controlling a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted Feb 2, 2021·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →