Inventor · disambiguated record
Matthias Roesch
Also filed as: ROESCH MATTHIAS
6 granted patents·1 pending application·27 citations·filing 2011–2024
77Inventor score
Top patents by PatentIndex Score
7 records- 0194US8203696B2Projection exposure apparatus with optimized adjustment possibilityBITTNER BORIS·Filed 2011·Granted Jun 19, 2012·20 cites·6 claims
- 0279US10001631B2Projection lens for EUV microlithography, film element and method for producing a projection lens comprising a film elementZEISS CARL SMT GMBH·Filed 2014·Granted Jun 19, 2018·6 cites·40 claims
- 0371US9354524B2Projection exposure apparatus with optimized adjustment possibilityBITTNER BORIS·Filed 2012·Granted May 31, 2016·1 cites·66 claims
- 0463US2024361704A1Method for simulating illumination and imaging properties of an optical production system during the illumination and imaging of an object by means of an optical measurement systemZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 0562US11531272B2Pupil stop for an illumination optical unit of a metrology systemZEISS CARL SMT GMBH·Filed 2022·Granted Dec 20, 2022·0 cites·20 claims
- 0660US9052609B2Projection exposure apparatus with optimized adjustment possibilityZEISS CARL SMT GMBH·Filed 2014·Granted Jun 9, 2015·0 cites·30 claims
- 0758US10054860B2Projection exposure apparatus with optimized adjustment possibilityZEISS CARL SMT GMBH·Filed 2016·Granted Aug 21, 2018·0 cites·28 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →