Inventor · disambiguated record
Sommawan Khumpuang
Also filed as: KHUMPUANG SOMMAWAN
13 granted patents·4 pending applications·4 citations·filing 2012–2022
82Inventor score
Files withAIST11NAT INST ADVANCED IND SCIENCE & TECH3FUJIKOSHI MACHINERY CORP2NAT INST OF ADVANCED IND SCIEN1
Top patents by PatentIndex Score
17 records- 0171US9017146B2Wafer polishing apparatusFUJIKOSHI MACHINERY CORP·Filed 2013·Granted Apr 28, 2015·2 cites·29 claims
- 0266US9777375B2Converging mirror furnaceNAT INST ADVANCED IND SCIENCE & TECH·Filed 2012·Granted Oct 3, 2017·2 cites·25 claims
- 0365US11686479B2Encapsulated cleanroom systemAIST·Filed 2021·Granted Jun 27, 2023·0 cites·7 claims
- 0451US2025140580A1Wet processing apparatusAIST·Filed 2022·Application pending·0 cites
- 0548US10431446B2Wet processing apparatusAIST·Filed 2014·Granted Oct 1, 2019·0 cites·13 claims
- 0648US10186489B2Process substrate with crystal orientation mark, method of detecting crystal orientation, and reading device of crystal orientation markAIST·Filed 2014·Granted Jan 22, 2019·0 cites·10 claims
- 0748US2022341053A1Plating machine with treatment units arranged on circumferenceAIST·Filed 2022·Application pending·0 cites
- 0842US2015050602A1Spin Development Method and ApparatusNAT INST OF ADVANCED IND SCIEN·Filed 2012·Application pending·0 cites
- 0941US9513567B2Exposure apparatus and exposure methodNAT INST ADVANCED IND SCIENCE & TECH·Filed 2012·Granted Dec 6, 2016·0 cites·11 claims
- 1040US11056410B2Method of manufacturing semiconductor package using alignment mark on waferAIST·Filed 2018·Granted Jul 6, 2021·0 cites·15 claims
- 1139US9123795B2Method of manufacturing semiconductor wafersFUJIKOSHI MACHINERY CORP·Filed 2013·Granted Sep 1, 2015·0 cites·12 claims
- 1237US10163674B2Circular support substrate for semiconductorAIST·Filed 2015·Granted Dec 25, 2018·0 cites·18 claims
- 1337US10163819B2Surface mount package and manufacturing method thereofAIST·Filed 2015·Granted Dec 25, 2018·0 cites·14 claims
- 1432US10286426B2Columnar laminar flow generation device and method for generating columnar laminar flowsAIST·Filed 2016·Granted May 14, 2019·0 cites·20 claims
- 1531US10304675B2System for integrating preceding steps and subsequent stepsAIST·Filed 2015·Granted May 28, 2019·0 cites·4 claims
- 1629US10478867B2Treatment liquid supply device using syringe, and wet treatment deviceAIST·Filed 2015·Granted Nov 19, 2019·0 cites·7 claims
- 1728US2017098557A1Plasma processing deviceNAT INST ADVANCED IND SCIENCE & TECH·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →