Inventor · disambiguated record
Toshihiko Iijima
Also filed as: IIJIMA TOSHIHIKO
14 granted patents·2 pending applications·107 citations·filing 1989–2014
91Inventor score
Top patents by PatentIndex Score
16 records- 0184US10108162B2Processing device group controller, manufacturing process system, processing device group control method, manufacturing optimization system, manufacturing optimization device, and manufacturing optimization methodTOKYO ELECTRON LTD·Filed 2014·Granted Oct 23, 2018·8 cites·15 claims
- 0284US7457680B2Conveyance method for transporting objectsTOKYO ELECTRON LTD·Filed 2006·Granted Nov 25, 2008·10 cites·4 claims
- 0382US6874638B2Wafer cassetteTOKYO ELECTRON LTD·Filed 2002·Granted Apr 5, 2005·28 cites·8 claims
- 0475US7458469B2Substrate transfer apparatus and method, and storage mediumTOKYO ELECTRON LTD·Filed 2005·Granted Dec 2, 2008·5 cites·12 claims
- 0573US8319510B2Pre-alignment method of semiconductor wafer and computer-readable recording medium having pre-alignment program recorded thereonOGINO KAZUHITO·Filed 2010·Granted Nov 27, 2012·7 cites·6 claims
- 0672US7283890B2Work convey system, unmanned convey vehicle system, unmanned convey vehicle, and work convey methodTOKYO ELECTRON LTD·Filed 2002·Granted Oct 16, 2007·15 cites·6 claims
- 0766US10012980B2Modifying operational efficiency by repositioning process apparatusTOKYO ELECTRON LTD·Filed 2014·Granted Jul 3, 2018·2 cites·5 claims
- 0860US5469308AManagement apparatus for a plurality of cassettesTOSHIBA KK·Filed 1994·Granted Nov 21, 1995·16 cites·1 claims
- 0959US7826918B2Transfer system and transfer method of object to be processedTOKYO ELECTRON LTD·Filed 2006·Granted Nov 2, 2010·2 cites·13 claims
- 1055US8121723B2Substrate transfer system, substrate transfer apparatus and storage mediumIIJIMA TOSHIHIKO·Filed 2006·Granted Feb 21, 2012·1 cites·17 claims
- 1152US9696711B2Processing instructing device, processing instructing method, computer program and processing deviceASAKAWA TERUO·Filed 2012·Granted Jul 4, 2017·1 cites·20 claims
- 1247US2005209725A1Conveyance system, conveyance method and vacuum holding apparatus for object to be processed, and centering method for waferAKIYAMA SHUJI·Filed 2005·Application pending·0 cites
- 1339US2004046545A1Conveyance system, conveyance method and vacuum holding apparatus for object to be processed, and centering method for waterFiled 2001·Application pending·0 cites
- 1438US5892686AWafer prober systemTOKYO ELECTRON LTD·Filed 1996·Granted Apr 6, 1999·8 cites·5 claims
- 1537US8866503B2Wafer chuck inclination correcting method and probe apparatusISHII KAZUNARI·Filed 2011·Granted Oct 21, 2014·0 cites·10 claims
- 1630US5034684AProbe device and method of controlling the sameTOKYO ELECTRON LTD·Filed 1989·Granted Jul 23, 1991·4 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →