Inventor · disambiguated record
Souvik Banerjee
Also filed as: BANERJEE SOUVIK
9 granted patents·5 pending applications·358 citations·filing 2002–2022
90Inventor score
Top patents by PatentIndex Score
14 records- 0196US6848458B1Apparatus and methods for processing semiconductor substrates using supercritical fluidsNOVELLUS SYSTEMS INC·Filed 2002·Granted Feb 1, 2005·162 cites·59 claims
- 0295US7503334B1Apparatus and methods for processing semiconductor substrates using supercritical fluidsNOVELLUS SYSTEMS INC·Filed 2005·Granted Mar 17, 2009·49 cites·13 claims
- 0391US6800142B1Method for removing photoresist and post-etch residue using activated peroxide followed by supercritical fluid treatmentNOVELLUS SYSTEMS INC·Filed 2002·Granted Oct 5, 2004·57 cites·46 claims
- 0489US6852173B2Liquid-assisted cryogenic cleaningBOC INC·Filed 2002·Granted Feb 8, 2005·45 cites·21 claims
- 0581US6949145B2Vapor-assisted cryogenic cleaningBOC INC·Filed 2003·Granted Sep 27, 2005·19 cites·22 claims
- 0675US6905556B1Method and apparatus for using surfactants in supercritical fluid processing of wafersNOVELLUS SYSTEMS INC·Filed 2002·Granted Jun 14, 2005·19 cites·12 claims
- 0763US7056391B2Liquid-assisted cryogenic cleaningBOC INC·Filed 2004·Granted Jun 6, 2006·7 cites·12 claims
- 0860US12378257B2Metabolically stable pyrimidinyl dihydroquinoxalinones as tubulin polymerization inhibitorsUNIV TENNESSEE RES FOUND·Filed 2022·Granted Aug 5, 2025·0 cites·3 claims
- 0956US11124490B2Autotaxin inhibitorsUNIV TENNESSEE RES FOUND·Filed 2017·Granted Sep 21, 2021·0 cites·1 claims
- 1037US2009126760A1System for cleaning a surface using crogenic aerosol and fluid reactantBOC INC·Filed 2005·Application pending·0 cites
- 1137US2013269732A1System for delivery of purified multiple phases of carbon dioxide to a process toolBANERJEE SOUVIK·Filed 2013·Application pending·0 cites
- 1236US2005217706A1Fluid assisted cryogenic cleaningBANERJEE SOUVIK·Filed 2003·Application pending·0 cites
- 1335US2004029494A1Post-CMP cleaning of semiconductor wafer surfaces using a combination of aqueous and CO2 based cryogenic cleaning techniquesFiled 2002·Application pending·0 cites
- 1433US2007089761A1Non-plasma method of removing photoresist from a substrateBANERJEE SOUVIK·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →