Inventor · disambiguated record
Shinji Imatou
Also filed as: IMATOU SHINJI
11 granted patents·370 citations·filing 1989–2000
93Inventor score
Files withSEMICONDUCTOR ENERGY LAB11
Top patents by PatentIndex Score
11 records- 0193US4970366ALaser patterning apparatus and methodSEMICONDUCTOR ENERGY LAB·Filed 1989·Granted Nov 13, 1990·70 cites·5 claims
- 0292US4971667APlasma processing method and apparatusSEMICONDUCTOR ENERGY LAB·Filed 1989·Granted Nov 20, 1990·52 cites·15 claims
- 0384US5079031AApparatus and method for forming thin filmsSEMICONDUCTOR ENERGY LAB·Filed 1989·Granted Jan 7, 1992·29 cites·8 claims
- 0477US5147822APlasma processing method for improving a package of a semiconductor deviceSEMICONDUCTOR ENERGY LAB·Filed 1991·Granted Sep 15, 1992·57 cites·11 claims
- 0576US6191492B1Electronic device including a densified regionSEMICONDUCTOR ENERGY LAB·Filed 1993·Granted Feb 20, 2001·52 cites·35 claims
- 0674US5283087APlasma processing method and apparatusSEMICONDUCTOR ENERGY LAB·Filed 1992·Granted Feb 1, 1994·25 cites·24 claims
- 0768US6756670B1Electronic device and its manufacturing methodSEMICONDUCTOR ENERGY LAB·Filed 2000·Granted Jun 29, 2004·15 cites·30 claims
- 0863US4987004APlasma processing method and apparatusSEMICONDUCTOR ENERGY LAB·Filed 1990·Granted Jan 22, 1991·22 cites·16 claims
- 0962US5256483APlasma processing method and apparatusSEMICONDUCTOR ENERGY LAB·Filed 1990·Granted Oct 26, 1993·15 cites·28 claims
- 1059US5013688AMethod of manufacturing a semiconductor using plasma processingSEMICONDUCTOR ENERGY LAB·Filed 1989·Granted May 7, 1991·23 cites·9 claims
- 1145US5007374AApparatus for forming thin films in quantitySEMICONDUCTOR ENERGY LAB·Filed 1989·Granted Apr 16, 1991·10 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →