Inventor · disambiguated record
Deepak Vedhachalam
Also filed as: Vedhachalam Deepak
3 granted patents·52 citations·filing 2017–2020
68Inventor score
Files withTOKYO ELECTRON LTD3
Top patents by PatentIndex Score
3 records- 0193US10773282B2Controlling dry etch process characteristics using waferless dry clean optical emission spectroscopyTOKYO ELECTRON LTD·Filed 2017·Granted Sep 15, 2020·45 cites·16 claims
- 0290US10436717B2Compositional optical emission spectroscopy for detection of particle induced arcs in a fabrication processTOKYO ELECTRON LTD·Filed 2017·Granted Oct 8, 2019·7 cites·20 claims
- 0357US11273469B2Controlling dry etch process characteristics using waferless dry clean optical emission spectroscopyTOKYO ELECTRON LTD·Filed 2020·Granted Mar 15, 2022·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →