Inventor · disambiguated record
Il-Kwang Yang
Also filed as: YANG IL-KWANG
16 granted patents·19 pending applications·35 citations·filing 2009–2017
89Inventor score
Top patents by PatentIndex Score
35 records- 0187US9620395B2Apparatus for processing substrate for supplying reaction gas having phase differenceEUGENE TECHNOLOGY CO LTD·Filed 2012·Granted Apr 11, 2017·9 cites·11 claims
- 0284US9593415B2Substrate processing apparatus including auxiliary gas supply portEUGENE TECHNOLOGY CO LTD·Filed 2012·Granted Mar 14, 2017·7 cites·10 claims
- 0382US9875895B2Substrate processing apparatus including exhaust ports and substrate processing methodEUGENE TECHNOLOGY CO LTD·Filed 2012·Granted Jan 23, 2018·5 cites·3 claims
- 0478US9368380B2Substrate processing device with connection spaceEUGENE TECHNOLOGY CO LTD·Filed 2014·Granted Jun 14, 2016·4 cites·8 claims
- 0576US9593418B2Showerhead having cooling system and substrate processing apparatus including the showerheadEUGENE TECHNOLOGY CO LTD·Filed 2012·Granted Mar 14, 2017·1 cites·10 claims
- 0674US10192760B2Substrate supporting unit, substrate processing apparatus, and method of manufacturing substrate supporting unitEUGENE TECHNOLOGY CO LTD·Filed 2015·Granted Jan 29, 2019·2 cites·3 claims
- 0774US9758870B2Substrate treatment apparatus, and method for controlling temperature of heaterEUGENE TECHNOLOGY CO LTD·Filed 2013·Granted Sep 12, 2017·3 cites·8 claims
- 0872US9869019B2Substrate processing apparatus including processing unitEUGENE TECHNOLOGY CO LTD·Filed 2012·Granted Jan 16, 2018·3 cites·13 claims
- 0961US9953850B2Substrate processing apparatus including heat-shield plateEUGENE TECHNOLOGY CO LTD·Filed 2012·Granted Apr 24, 2018·1 cites·4 claims
- 1052US2010276393A1Plasma processing apparatus and methodEUGENE TECHNOLOGY CO LTD·Filed 2009·Application pending·0 cites
- 1152US2014331933A1Apparatus for processing apparatus having side pumping typeEUGENE TECHNOLOGY CO LTD·Filed 2012·Application pending·0 cites
- 1252US2010319621A1Plasma processing apparatus and plasma processing methodEUGENE TECHNOLOGY CO LTD·Filed 2009·Application pending·0 cites
- 1349US10593545B2Method for substrate processing using exhaust portsEUGENE TECHNOLOGY CO LTD·Filed 2017·Granted Mar 17, 2020·0 cites·3 claims
- 1449US8312840B2Substrate processing apparatus and methodYANG IL-KWANG·Filed 2009·Granted Nov 20, 2012·0 cites·4 claims
- 1547US10622228B2Substrate supporting unit, substrate processing apparatus, and method of manufacturing substrate supporting unitEUGENE TECHNOLOGY CO LTD·Filed 2016·Granted Apr 14, 2020·0 cites·7 claims
- 1647US2010330301A1Apparatus and method for processing substrateEUGENE TECHNOLOGY CO LTD·Filed 2009·Application pending·0 cites
- 1747US2011000618A1Apparatus and method for processing substrateEUGENE TECHNOLOGY CO LTD·Filed 2009·Application pending·0 cites
- 1847US2011014397A1Apparatus and method for processing substrateEUGENE TECHNOLOGY CO LTD·Filed 2009·Application pending·0 cites
- 1946US8528499B2Substrate processing apparatus and methodJE SUNG-TAE·Filed 2009·Granted Sep 10, 2013·0 cites·5 claims
- 2044US2010319855A1Substrate supporting unit, substrate processing apparatus, and method of manufacturing substrate supporting unitEUGENE TECHNOLOGY CO LTD·Filed 2009·Application pending·0 cites
- 2143US9644895B2Heater moving type substrate processing apparatusEUGENE TECHNOLOGY CO LTD·Filed 2013·Granted May 9, 2017·0 cites·11 claims
- 2243US2015380284A1Apparatus for processing substrateEUGENE TECHNOLOGY CO LTD·Filed 2014·Application pending·0 cites
- 2343US2015369539A1Apparatus for processing substrateEUGENE TECHNOLOGY CO LTD·Filed 2014·Application pending·0 cites
- 2442US2015252476A1Substrate processing apparatusEUGENE TECHNOLOGY CO LTD·Filed 2013·Application pending·0 cites
- 2542US2015337460A1Substrate-processing deviceEUGENE TECHNOLOGY CO LTD·Filed 2014·Application pending·0 cites
- 2642US2015267291A1Purge chamber, and substrate-processing apparatus including sameEUGENE TECHNOLOGY CO LTD·Filed 2013·Application pending·0 cites
- 2741US2015191821A1Substrate processing deviceEUGENE TECHNOLOGY CO LTD·Filed 2013·Application pending·0 cites
- 2841US2015211116A1Substrate processing deviceEUGENE TECHNOLOGY CO LTD·Filed 2013·Application pending·0 cites
- 2941US2015136026A1Apparatus for processing substrateEUGENE TECHNOLOGY CO LTD·Filed 2013·Application pending·0 cites
- 3041US2015122177A1Apparatus for processing substrateEUGENE TECHNOLOGY CO LTD·Filed 2013·Application pending·0 cites
- 3140US9564294B2Plasma treatment apparatus and plasma antennaWOO SANG HO·Filed 2009·Granted Feb 7, 2017·0 cites·2 claims
- 3240US2014341682A1Substrate processing module and substrate processing apparatus including the sameEUGENE TECHNOLOGY CO LTD·Filed 2012·Application pending·0 cites
- 3334US2013149078A1Substrate-processing apparatus and substrate-transferring methodJE SUNG TAE·Filed 2011·Application pending·0 cites
- 3430US9416451B2Substrate processing device equipped with semicircle shaped antennaJE SUNG TAE·Filed 2011·Granted Aug 16, 2016·0 cites·7 claims
- 3530US2013186337A1Substrate processing device for supplying reaction gas through symmetry-type inlet and outletJE SUNG TAE·Filed 2011·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Il-Kwang Yang files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →