Inventor · disambiguated record
John D. Heaton
Also filed as: HEATON JOHN D
11 granted patents·670 citations·filing 1998–2007
93Inventor score
Files withNANOMETRICS INC11
Top patents by PatentIndex Score
11 records- 0197US6982793B1Method and apparatus for using an alignment target with designed in offsetNANOMETRICS INC·Filed 2002·Granted Jan 3, 2006·216 cites·49 claims
- 0296US6992764B1Measuring an alignment target with a single polarization stateNANOMETRICS INC·Filed 2002·Granted Jan 31, 2006·115 cites·24 claims
- 0395US7046361B1Positioning two elements using an alignment target with a designed offsetNANOMETRICS INC·Filed 2002·Granted May 16, 2006·75 cites·25 claims
- 0494US7230705B1Alignment target with designed in offsetNANOMETRICS INC·Filed 2005·Granted Jun 12, 2007·69 cites·27 claims
- 0593US6713753B1Combination of normal and oblique incidence polarimetry for the characterization of gratingsNANOMETRICS INC·Filed 2001·Granted Mar 30, 2004·66 cites·20 claims
- 0685US6958819B1Encoder with an alignment targetNANOMETRICS INC·Filed 2002·Granted Oct 25, 2005·28 cites·45 claims
- 0777US7289215B2Image control in a metrology/inspection positioning systemNANOMETRICS INC·Filed 2007·Granted Oct 30, 2007·7 cites·22 claims
- 0877US6910847B1Precision polar coordinate stageNANOMETRICS INC·Filed 2002·Granted Jun 28, 2005·22 cites·43 claims
- 0974US6970255B1Encoder measurement based on layer thicknessNANOMETRICS INC·Filed 2003·Granted Nov 29, 2005·15 cites·22 claims
- 1072US7295314B1Metrology/inspection positioning systemNANOMETRICS INC·Filed 1999·Granted Nov 13, 2007·38 cites·20 claims
- 1156US6108077ASample support with a non-reflecting sample supporting surfaceNANOMETRICS INC·Filed 1998·Granted Aug 22, 2000·19 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →