Inventor · disambiguated record
Dukhyun Son
Also filed as: SON DUKHYUN
9 granted patents·6 pending applications·8 citations·filing 2011–2024
77Inventor score
Top patents by PatentIndex Score
15 records- 0174US9715996B2Adjustable capacitor, plasma impedance matching device, plasma impedance matching method, and substrate treating apparatusSON DUKHYUN·Filed 2011·Granted Jul 25, 2017·8 cites·27 claims
- 0274US2025038023A1Container and substrate treating apparatusSEMES CO LTD·Filed 2024·Application pending·0 cites
- 0367US12148641B2Container and substrate treating apparatusSEMES CO LTD·Filed 2021·Granted Nov 19, 2024·0 cites·18 claims
- 0465US12266512B2Plasma processing apparatusSEMES CO LTD·Filed 2023·Granted Apr 1, 2025·0 cites·20 claims
- 0563US11295936B2Apparatus and method for treating substrateSEMES CO LTD·Filed 2020·Granted Apr 5, 2022·0 cites·7 claims
- 0661US12087560B2Apparatus and method for treating substrateSEMES CO LTD·Filed 2021·Granted Sep 10, 2024·0 cites·10 claims
- 0760US2025201599A1Equipment front-end module and method for controlling humidity in equipment front-end moduleSEMES CO LTD·Filed 2024·Application pending·0 cites
- 0854US2023348207A1Transfer plate set and substrate transfer apparatusSEMES CO LTD·Filed 2023·Application pending·0 cites
- 0953US2023360893A1Plasma processing apparatusSEMES CO LTD·Filed 2023·Application pending·0 cites
- 1051US11699599B2Substrate transfer apparatus and substrate treating apparatusSEMES CO LTD·Filed 2020·Granted Jul 11, 2023·0 cites·15 claims
- 1148US2023317436A1Substrate processing apparatusSEMES CO LTD·Filed 2023·Application pending·0 cites
- 1246US11756817B2Apparatus and method for processing substrateSEMES CO LTD·Filed 2020·Granted Sep 12, 2023·0 cites·19 claims
- 1345US11569110B2Buffer unit, and apparatus and method for treating substrate with the unitSEMES CO LTD·Filed 2019·Granted Jan 31, 2023·0 cites·7 claims
- 1445US11056367B2Buffer unit, and apparatus for treating substrate with the unitSEMES CO LTD·Filed 2019·Granted Jul 6, 2021·0 cites·20 claims
- 1534US2013105082A1Substrate processing device and impedance matching methodSEMES CO LTD·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →