Inventor · disambiguated record
Mitsuru Hiura
Also filed as: HIURA MITSURU
10 granted patents·100 citations·filing 1995–2016
87Inventor score
Top patents by PatentIndex Score
10 records- 0191US6891175B2Exposure apparatus and device manufacturing method using the sameCANON KK·Filed 2001·Granted May 10, 2005·46 cites·13 claims
- 0281US9442370B2Imprinting method, imprinting apparatus, and device manufacturing methodCANON KK·Filed 2014·Granted Sep 13, 2016·3 cites·10 claims
- 0378US7295285B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2006·Granted Nov 13, 2007·5 cites·10 claims
- 0477US9851634B2Imprint apparatusCANON KK·Filed 2013·Granted Dec 26, 2017·3 cites·11 claims
- 0576US7274435B2Exposure apparatus and device fabrication method using the sameCANON KK·Filed 2003·Granted Sep 25, 2007·20 cites·6 claims
- 0670US10073339B2Imprint apparatusCANON KK·Filed 2014·Granted Sep 11, 2018·1 cites·14 claims
- 0769US9541825B2Imprint apparatus and article manufacturing methodCANON KK·Filed 2013·Granted Jan 10, 2017·1 cites·10 claims
- 0866US9616613B2Imprint apparatus including alignment and overlay measurementCANON KK·Filed 2013·Granted Apr 11, 2017·1 cites·16 claims
- 0961US9910351B2Imprint apparatus and article manufacturing methodCANON KK·Filed 2016·Granted Mar 6, 2018·0 cites·10 claims
- 1060US5500528AScanning electron microscopeNIKON CORP·Filed 1995·Granted Mar 19, 1996·20 cites·10 claims
Join the waitlist — get patent alerts
Get an alert when Mitsuru Hiura files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →