Inventor · disambiguated record
Vladimir Vitalevich Ivanov
Also filed as: IVANOV VLADIMIR VITALEVICH
16 granted patents·8 pending applications·16 citations·filing 2006–2014
88Inventor score
Files withASML NETHERLANDS BV11IVANOV VLADIMIR VITALEVICH3BANINE VADIM YEVGENYEVICH2YAKUNIN ANDREI MIKHAILOVICH2GLUSHKOV DENIS ALEXANDROVICH1
Top patents by PatentIndex Score
24 records- 0175US8368040B2Radiation system and lithographic apparatusASML NETHERLANDS BV·Filed 2010·Granted Feb 5, 2013·4 cites·12 claims
- 0269US8755032B2Radiation source and lithographic apparatusYAKUNIN ANDREI MIKHAILOVICH·Filed 2009·Granted Jun 17, 2014·2 cites·25 claims
- 0361US8685632B2Radiation source, lithographic apparatus and device manufacturing methodKEMPEN ANTONIUS THEODORUS WILHELMUS·Filed 2009·Granted Apr 1, 2014·1 cites·5 claims
- 0461US8493548B2Lithographic apparatus and device manufacturing methodIVANOV VLADIMIR VITALEVICH·Filed 2007·Granted Jul 23, 2013·3 cites·39 claims
- 0556US8901521B2Module and method for producing extreme ultraviolet radiationVAN EMPEL TJARKO ADRIAAN RUDOLF·Filed 2008·Granted Dec 2, 2014·3 cites·31 claims
- 0653US9363879B2Module and method for producing extreme ultraviolet radiationASML NETHERLANDS BV·Filed 2014·Granted Jun 7, 2016·0 cites·19 claims
- 0752US7763871B2Radiation sourceASML NETHERLANDS BV·Filed 2008·Granted Jul 27, 2010·2 cites·18 claims
- 0849US8317929B2Lithographic apparatus comprising an electrical discharge generator and method for cleaning an element of a lithographic apparatusRAKHIMOVA TATYANA VICTOROVNA·Filed 2006·Granted Nov 27, 2012·1 cites·18 claims
- 0949US7825390B2Apparatus with plasma radiation source and method of forming a beam of radiation and lithographic apparatusASML NETHERLANDS BV·Filed 2007·Granted Nov 2, 2010·0 cites·20 claims
- 1049US7772570B2Assembly for blocking a beam of radiation and method of blocking a beam of radiationASML NETHERLANDS BV·Filed 2006·Granted Aug 10, 2010·0 cites·22 claims
- 1149US2011013274A1Extreme ultraviolet microscopeASML NETHERLANDS BV·Filed 2008·Application pending·0 cites
- 1247US2011037960A1Lithographic apparatus, device manufacturing method, cleaning system and method for cleaning a patterning deviceASML NETHERLANDS BV·Filed 2009·Application pending·0 cites
- 1346US8242473B2Radiation sourceBANINE VADIM YEVGENYEVICH·Filed 2010·Granted Aug 14, 2012·0 cites·18 claims
- 1444US2008266654A1Extreme ultraviolet microscopeASML NETHERLANDS BV·Filed 2007·Application pending·0 cites
- 1544US2013287968A1Lithographic apparatus and device manufacturing methodIVANOV VLADIMIR VITALEVICH·Filed 2013·Application pending·0 cites
- 1643US8294128B2Apparatus with plasma radiation source and method of forming a beam of radiationKRIVTSUN VLADIMIR MIHAILOVITCH·Filed 2010·Granted Oct 23, 2012·0 cites·17 claims
- 1740US2013077073A1Methods to control euv exposure dose and euv lithographic methods and apparatus using such methodsVAN SCHOOT JAN BERNARD PLECHELMUS·Filed 2012·Application pending·0 cites
- 1838US9411250B2Radiation system and lithographic apparatusBANINE VADIM YEVGENYEVICH·Filed 2009·Granted Aug 9, 2016·0 cites·41 claims
- 1938US9366967B2Radiation sourceYAKUNIN ANDREI MIKHAILOVICH·Filed 2012·Granted Jun 14, 2016·0 cites·13 claims
- 2037US2011170083A1Lithographic Apparatus and Device Manufacturing MethodASML NETHERLANDS BV·Filed 2010·Application pending·0 cites
- 2136US2013015373A1EUV Radiation Source and EUV Radiation Generation MethodASML NETHERLANDS BV·Filed 2011·Application pending·0 cites
- 2235US7872244B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2007·Granted Jan 18, 2011·0 cites·36 claims
- 2333US9307624B2Lithographic apparatusGLUSHKOV DENIS ALEXANDROVICH·Filed 2009·Granted Apr 5, 2016·0 cites·15 claims
- 2431US2013070218A1System for removing contaminant particles, lithographic apparatus, method for removing contaminant particles and method for manufacturing a deviceIVANOV VLADIMIR VITALEVICH·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →