Inventor · disambiguated record
Alexander I. Ershov
Also filed as: ERSHOV ALEXANDER · ERSHOV ALEXANDER I · ERSHOV ALEXANDER IGOREVICH
151 granted patents·12 pending applications·6,330 citations·filing 1997–2023
99Inventor score
Top patents by PatentIndex Score
163 records- 0199US7196342B2Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light sourceCYMER INC·Filed 2005·Granted Mar 27, 2007·284 cites·9 claims
- 0299US6567450B2Very narrow band, two chamber, high rep rate gas discharge laser systemCYMER INC·Filed 2001·Granted May 20, 2003·265 cites·52 claims
- 0399US6549551B2Injection seeded laser with precise timing controlCYMER INC·Filed 2001·Granted Apr 15, 2003·186 cites·11 claims
- 0498US7671349B2Laser produced plasma EUV light sourceCYMER INC·Filed 2007·Granted Mar 2, 2010·54 cites·32 claims
- 0598US7655925B2Gas management system for a laser-produced-plasma EUV light sourceCYMER INC·Filed 2007·Granted Feb 2, 2010·43 cites·20 claims
- 0698US7491954B2Drive laser delivery systems for EUV light sourceCYMER INC·Filed 2006·Granted Feb 17, 2009·84 cites·60 claims
- 0798US7439530B2LPP EUV light source drive laser systemCYMER INC·Filed 2005·Granted Oct 21, 2008·76 cites·44 claims
- 0898US6690704B2Control system for a two chamber gas discharge laserCYMER INC·Filed 2002·Granted Feb 10, 2004·128 cites·38 claims
- 0998US6625191B2Very narrow band, two chamber, high rep rate gas discharge laser systemCYMER INC·Filed 2001·Granted Sep 23, 2003·236 cites·78 claims
- 1098US6535531B1Gas discharge laser with pulse multiplierCYMER INC·Filed 2001·Granted Mar 18, 2003·166 cites·9 claims
- 1198US6128323AReliable modular production quality narrow-band high REP rate excimer laserCYMER INC·Filed 1998·Granted Oct 3, 2000·284 cites·56 claims
- 1298US5991324AReliable. modular, production quality narrow-band KRF excimer laserCYMER INC·Filed 1998·Granted Nov 23, 1999·196 cites·16 claims
- 1398US5856991AVery narrow band laserCYMER INC·Filed 1997·Granted Jan 5, 1999·198 cites·15 claims
- 1497US8198615B2Gas management system for a laser-produced-plasma EUV light sourceBYKANOV ALEXANDER N·Filed 2010·Granted Jun 12, 2012·21 cites·20 claims
- 1597US8158960B2Laser produced plasma EUV light sourceVASCHENKO GEORGIY O·Filed 2010·Granted Apr 17, 2012·35 cites·20 claims
- 1697US7885309B2Laser systemCYMER INC·Filed 2007·Granted Feb 8, 2011·37 cites·23 claims
- 1797US7872245B2Systems and methods for target material delivery in a laser produced plasma EUV light sourceCYMER INC·Filed 2008·Granted Jan 18, 2011·90 cites·25 claims
- 1897US6192064B1Narrow band laser with fine wavelength controlCYMER INC·Filed 1999·Granted Feb 20, 2001·258 cites·19 claims
- 1997US6094448AGrating assembly with bi-directional bandwidth controlCYMER INC·Filed 1999·Granted Jul 25, 2000·194 cites·8 claims
- 2096US7822092B2Laser systemCYMER INC·Filed 2007·Granted Oct 26, 2010·37 cites·15 claims
- 2196US7164144B2EUV light sourceCYMER INC·Filed 2004·Granted Jan 16, 2007·113 cites·49 claims
- 2296US7154928B2Laser output beam wavefront splitter for bandwidth spectrum controlCYMER INC·Filed 2004·Granted Dec 26, 2006·62 cites·64 claims
- 2396US6693939B2Laser lithography light source with beam deliveryCYMER INC·Filed 2002·Granted Feb 17, 2004·115 cites·2 claims
- 2496US6538737B2High resolution etalon-grating spectrometerCYMER INC·Filed 2001·Granted Mar 25, 2003·109 cites·8 claims
- 2596US5982800ANarrow band excimer laserCYMER INC·Filed 1997·Granted Nov 9, 1999·122 cites·9 claims
- 2696US5835520AVery narrow band KrF laserCYMER INC·Filed 1997·Granted Nov 10, 1998·140 cites·4 claims
- 2795US7630424B2Laser systemCYMER INC·Filed 2007·Granted Dec 8, 2009·24 cites·24 claims
- 2895US7247870B2Systems for protecting internal components of an EUV light source from plasma-generated debrisCYMER INC·Filed 2006·Granted Jul 24, 2007·28 cites·20 claims
- 2995US6904073B2High power deep ultraviolet laser with long life opticsCYMER INC·Filed 2003·Granted Jun 7, 2005·78 cites·87 claims
- 3095US5970082AVery narrow band laserCYMER INC·Filed 1997·Granted Oct 19, 1999·116 cites·17 claims
- 3194US10635002B2Faceted EUV optical elementASML NETHERLANDS BV·Filed 2016·Granted Apr 28, 2020·5 cites·21 claims
- 3294US7598509B2Laser produced plasma EUV light sourceCYMER INC·Filed 2006·Granted Oct 6, 2009·41 cites·50 claims
- 3394US7217940B2Collector for EUV light sourceCYMER INC·Filed 2004·Granted May 15, 2007·60 cites·137 claims
- 3494US7109503B1Systems for protecting internal components of an EUV light source from plasma-generated debrisCYMER INC·Filed 2005·Granted Sep 19, 2006·25 cites·20 claims
- 3594US7079564B2Control system for a two chamber gas discharge laserCYMER INC·Filed 2005·Granted Jul 18, 2006·26 cites·108 claims
- 3694US6865210B2Timing control for two-chamber gas discharge laser systemCYMER INC·Filed 2001·Granted Mar 8, 2005·43 cites·26 claims
- 3793US8604452B2Drive laser delivery systems for EUV light sourceERSHOV ALEXANDER I·Filed 2011·Granted Dec 10, 2013·13 cites·20 claims
- 3893US7567607B2Very narrow band, two chamber, high rep-rate gas discharge laser systemCYMER INC·Filed 2006·Granted Jul 28, 2009·14 cites·3 claims
- 3993US7449704B2EUV light sourceCYMER INC·Filed 2006·Granted Nov 11, 2008·26 cites·26 claims
- 4093US7411203B2EUV light sourceCYMER INC·Filed 2006·Granted Aug 12, 2008·27 cites·32 claims
- 4193US7317196B2LPP EUV light sourceCYMER INC·Filed 2004·Granted Jan 8, 2008·54 cites·28 claims
- 4293US6704340B2Lithography laser system with in-place alignment toolCYMER INC·Filed 2002·Granted Mar 9, 2004·53 cites·13 claims
- 4393US6704339B2Lithography laser with beam delivery and beam pointing controlCYMER INC·Filed 2002·Granted Mar 9, 2004·50 cites·80 claims
- 4493US6590922B2Injection seeded F2 laser with line selection and discriminationCYMER INC·Filed 2001·Granted Jul 8, 2003·63 cites·18 claims
- 4593US6381257B1Very narrow band injection seeded F2 lithography laserCYMER INC·Filed 1999·Granted Apr 30, 2002·106 cites·14 claims
- 4693US6320663B1Method and device for spectral measurements of laser beamCYMER INC·Filed 2000·Granted Nov 20, 2001·59 cites·16 claims
- 4793US6014398ANarrow band excimer laser with gas additiveCYMER INC·Filed 1998·Granted Jan 11, 2000·106 cites·13 claims
- 4893US5978409ALine narrowing apparatus with high transparency prism beam expanderCYMER INC·Filed 1998·Granted Nov 2, 1999·104 cites·14 claims
- 4992US8170078B2Laser systemERSHOV ALEXANDER I·Filed 2011·Granted May 1, 2012·11 cites·20 claims
- 5092US8138487B2System, method and apparatus for droplet catcher for prevention of backsplash in a EUV generation chamberVASCHENKO GEORGIY O·Filed 2010·Granted Mar 20, 2012·16 cites·22 claims
Showing the top 50 of 163 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →