Inventor · disambiguated record
Shun-Long Chen
Also filed as: CHEN SHUN LONG
7 granted patents·148 citations·filing 1996–2002
86Inventor score
Files withTAIWAN SEMICONDUCTOR MFG7
Top patents by PatentIndex Score
7 records- 0189US6560862B1Modified pad for copper/low-kTAIWAN SEMICONDUCTOR MFG·Filed 2001·Granted May 13, 2003·65 cites·16 claims
- 0286US6518166B1Liquid phase deposition of a silicon oxide layer for use as a liner on the surface of a dual damascene opening in a low dielectric constant layerTAIWAN SEMICONDUCTOR MFG·Filed 2001·Granted Feb 11, 2003·41 cites·19 claims
- 0375US6818533B2Epitaxial plasma enhanced chemical vapor deposition (PECVD) method providing epitaxial layer with attenuated defectsTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Nov 16, 2004·25 cites·13 claims
- 0455US6730580B2Silicon substrate wafer fabrication method employing halogen gettering material and/or plasma annealingTAIWAN SEMICONDUCTOR MFG·Filed 2001·Granted May 4, 2004·7 cites·7 claims
- 0536US5701174ATemplate mask for assisting in optical inspection of oxidation induced stacking fault (OISF)TAIWAN SEMICONDUCTOR MFG·Filed 1996·Granted Dec 23, 1997·5 cites·10 claims
- 0632US5933229ATemplate mask for assisting in optical inspection of oxidation induced stacking fault (OISF)TAIWAN SEMICONDUCTOR MFG·Filed 1997·Granted Aug 3, 1999·3 cites·8 claims
- 0723US5746876ASafety sampler for hot acid in semiconductor manufacturing fabTAIWAN SEMICONDUCTOR MFG·Filed 1996·Granted May 5, 1998·2 cites·41 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →