Inventor · disambiguated record
Izuru Matsuda
Also filed as: MATSUDA IZURU
14 granted patents·1 pending application·330 citations·filing 1994–2005
93Inventor score
Files withMATSUSHITA ELECTRIC INDUSTRIAL CO LTD14
Top patents by PatentIndex Score
15 records- 0196US7513214B2Plasma processing method and apparatusMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2004·Granted Apr 7, 2009·139 cites·15 claims
- 0289US7292056B2Membrane with bumps, method of manufacturing the same, and method of testing electrical circuitMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2005·Granted Nov 6, 2007·15 cites·6 claims
- 0384US6808759B1Plasma processing method and apparatusMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2000·Granted Oct 26, 2004·26 cites·12 claims
- 0475US6648976B1Apparatus and method for plasma processingMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2000·Granted Nov 18, 2003·19 cites·10 claims
- 0568US6254683B1Substrate temperature control method and deviceMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1999·Granted Jul 3, 2001·35 cites·7 claims
- 0667US6864640B2Plasma processing method and apparatus thereofMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2001·Granted Mar 8, 2005·7 cites·40 claims
- 0765US6642533B2Substrate detecting method and deviceMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2001·Granted Nov 4, 2003·10 cites·17 claims
- 0859US7406925B2Plasma processing method and apparatusMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2004·Granted Aug 5, 2008·3 cites·3 claims
- 0959US6276892B1Wafer handling apparatusMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1999·Granted Aug 21, 2001·24 cites·11 claims
- 1058US6340281B1Method and apparatus for positioning a disk-shaped objectMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1999·Granted Jan 22, 2002·23 cites·4 claims
- 1150US6830653B2Plasma processing method and apparatusMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2002·Granted Dec 14, 2004·1 cites·6 claims
- 1250US6255223B1Substrate handling method and apparatus, and attractive force inspection method and apparatus used therewithMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1999·Granted Jul 3, 2001·15 cites·6 claims
- 1338US5514243ADry etching apparatusMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1994·Granted May 7, 1996·9 cites·8 claims
- 1436US2002038791A1Plasma processing method and apparatusFiled 2001·Application pending·0 cites
- 1533US6447613B1Substrate dechucking device and substrate dechucking methodMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1999·Granted Sep 10, 2002·4 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →