Inventor · disambiguated record
Yuehong Fu
Also filed as: FU YUEHONG
7 granted patents·3 pending applications·29 citations·filing 2004–2024
80Inventor score
Top patents by PatentIndex Score
10 records- 0194US10262887B2Pin lifter assembly with small gapLAM RES CORP·Filed 2016·Granted Apr 16, 2019·15 cites·20 claims
- 0285US10910195B2Substrate support with improved process uniformityLAM RES CORP·Filed 2017·Granted Feb 2, 2021·3 cites·12 claims
- 0385US10741425B2Helium plug design to reduce arcingLAM RES CORP·Filed 2017·Granted Aug 11, 2020·4 cites·16 claims
- 0478US2024282551A1Substrate support with improved process uniformityLAM RES CORP·Filed 2024·Application pending·0 cites
- 0577US8608851B2Plasma confinement apparatus, and method for confining a plasmaNI TOM·Filed 2006·Granted Dec 17, 2013·7 cites·11 claims
- 0670US11984296B2Substrate support with improved process uniformityLAM RES CORP·Filed 2021·Granted May 14, 2024·0 cites·13 claims
- 0755US10187965B2Plasma confinement apparatus, and method for confining a plasmaADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2013·Granted Jan 22, 2019·0 cites·18 claims
- 0853US2009090695A1Yttria insulator ring for use inside a plasma chamberLAM RES CORP·Filed 2008·Application pending·0 cites
- 0943US10460978B2Boltless substrate support assemblyLAM RES CORP·Filed 2017·Granted Oct 29, 2019·0 cites·18 claims
- 1042US2006043067A1Yttria insulator ring for use inside a plasma chamberLAM RES CORP·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →