Inventor · disambiguated record
Stanley W. Stone
Also filed as: STONE STANLEY A · STONE STANLEY W
5 granted patents·3 pending applications·14 citations·filing 2003–2016
71Inventor score
Top patents by PatentIndex Score
8 records- 0176US10573541B2System for semiconductor wafer retention and sensing in a vacuum load lockAXCELIS TECH INC·Filed 2016·Granted Feb 25, 2020·3 cites·26 claims
- 0269US9236216B2In-vacuum high speed pre-chill and post-heat stationsLEE WILLIAM D·Filed 2012·Granted Jan 12, 2016·3 cites·24 claims
- 0360US7214027B2Wafer handler method and systemVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2003·Granted May 8, 2007·8 cites·37 claims
- 0446US9611540B2Electrostatic chuck shielding mechanismOTA KAN·Filed 2008·Granted Apr 4, 2017·0 cites·19 claims
- 0544US2007173044A1Wafer Handler Method and SystemSTONE STANLEY W·Filed 2007·Application pending·0 cites
- 0639US7236853B2Automated robot alignment system and method using kinematic pins and end effector sensorVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2004·Granted Jun 26, 2007·0 cites·17 claims
- 0737US2005228542A1Auto-calibration method and device for wafer handler robotsVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2004·Application pending·0 cites
- 0835US2005011835A1High throughput flash purification stand and cartridgeSIGMA ALDRICH CO·Filed 2003·Application pending·0 cites
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