Inventor · disambiguated record
Wenxian Zhu
Also filed as: ZHU WENXIAN
9 granted patents·6 pending applications·833 citations·filing 2000–2023
91Inventor score
Top patents by PatentIndex Score
15 records- 0195US7211525B1Hydrogen treatment enhanced gap fillNOVELLUS SYSTEMS INC·Filed 2005·Granted May 1, 2007·540 cites·21 claims
- 0294US7078312B1Method for controlling etch process repeatabilityNOVELLUS SYSTEMS INC·Filed 2003·Granted Jul 18, 2006·163 cites·22 claims
- 0392US7344996B1Helium-based etch process in deposition-etch-deposition gap fillNOVELLUS SYSTEMS INC·Filed 2005·Granted Mar 18, 2008·22 cites·10 claims
- 0489US7476621B1Halogen-free noble gas assisted H2 plasma etch process in deposition-etch-deposition gap fillNOVELLUS SYSTEMS INC·Filed 2006·Granted Jan 13, 2009·15 cites·21 claims
- 0587US7163896B1Biased H2 etch process in deposition-etch-deposition gap fillNOVELLUS SYSTEMS INC·Filed 2003·Granted Jan 16, 2007·58 cites·20 claims
- 0680US9245793B2Plasma treatment of low-K surface to improve barrier depositionINTERMOLECULAR INC·Filed 2013·Granted Jan 26, 2016·5 cites·14 claims
- 0777US9224783B2Plasma densification of dielectrics for improved dielectric loss tangentINTERMOLECULAR INC·Filed 2013·Granted Dec 29, 2015·3 cites·19 claims
- 0876US6844612B1Low dielectric constant fluorine-doped silica glass film for use in integrated circuit chips and method of forming the sameNOVELLUS SYSTEMS INC·Filed 2003·Granted Jan 18, 2005·24 cites·8 claims
- 0964US2025297352A1Oxide buffer layer to promote ti02 crystallinity and increase ti02 refractive index for optical applicationsINTERMOLECULAR INC·Filed 2023·Application pending·0 cites
- 1056US2015176124A1Methods for Rapid Generation of ALD Saturation Curves Using Segmented Spatial ALDINTERMOLECULAR INC·Filed 2013·Application pending·0 cites
- 1151US2014134849A1Combinatorial Site Isolated Plasma Assisted DepositionINTERMOLECULAR INC·Filed 2012·Application pending·0 cites
- 1243US2015179508A1Tantalum-Based Copper Barriers and Methods for Forming the SameINTERMOLECULAR INC·Filed 2013·Application pending·0 cites
- 1342US2015179914A1Annealed dielectrics and heat-tolerant conductors for superconducting electronicsINTERMOLECULAR INC·Filed 2013·Application pending·0 cites
- 1437US6452129B1Plasma torch preventing gas backflows into the torchRETECH SYSTEMS LLC·Filed 2000·Granted Sep 17, 2002·3 cites·17 claims
- 1531US2017186935A1Low Temperature Deposition of Silicon Containing Layers in Superconducting CircuitsINTERMOLECULAR INC·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →