Inventor · disambiguated record
Megumi Uno
Also filed as: UNO MEGUMI
3 granted patents·4 pending applications·0 citations·filing 2019–2025
39Inventor score
Files withEBARA CORP7
Top patents by PatentIndex Score
7 records- 0166US2025144674A1Substrate cleaning apparatus and substrate cleaning methodEBARA CORP·Filed 2025·Application pending·0 cites
- 0266US2025144675A1Substrate cleaning apparatus and substrate cleaning methodEBARA CORP·Filed 2025·Application pending·0 cites
- 0361US2025076200A1Cleaning method and apparatus for washing tool, substrate washing apparatus and manufacturing method for washing toolEBARA CORP·Filed 2024·Application pending·0 cites
- 0453US12251738B2Method and apparatus for cleaning washing tool, substrate washing device, and method for manufacturing washing toolEBARA CORP·Filed 2021·Granted Mar 18, 2025·0 cites·7 claims
- 0553US2021039142A1Substrate cleaning apparatus and substrate cleaning methodEBARA CORP·Filed 2019·Application pending·0 cites
- 0652US12358028B2Cleaning apparatus for cleaning member, cleaning method for cleaning member, and substrate cleaning methodEBARA CORP·Filed 2021·Granted Jul 15, 2025·0 cites·5 claims
- 0745US12101073B2Method for determining a cleanliness of a cleaning memberEBARA CORP·Filed 2021·Granted Sep 24, 2024·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →