Inventor · disambiguated record
Norbert Muehlberger
Also filed as: MUEHLBERGER NORBERT
9 granted patents·29 citations·filing 2010–2016
84Inventor score
Top patents by PatentIndex Score
9 records- 0188US9411241B2Facet mirror for use in a projection exposure apparatus for microlithographyDINGER UDO·Filed 2010·Granted Aug 9, 2016·11 cites·27 claims
- 0287US8885143B2Projection exposure apparatus for microlithography for the production of semiconductor componentsFISCHER JUERGEN·Filed 2011·Granted Nov 11, 2014·7 cites·26 claims
- 0382US9996012B2Facet mirror for use in a projection exposure apparatus for microlithographyZEISS CARL SMT GMBH·Filed 2016·Granted Jun 12, 2018·2 cites·16 claims
- 0476US9448384B2Arrangement for mounting an optical elementZEISS CARL SMT GMBH·Filed 2013·Granted Sep 20, 2016·3 cites·27 claims
- 0576US9341807B2Gravitation compensation for optical elements in projection exposure apparatusesZEISS CARL SMT GMBH·Filed 2014·Granted May 17, 2016·3 cites·32 claims
- 0662US9013676B2Individual mirror for constructing a faceted mirror, in particular for use in a projection exposure system for microlithographyWERBER ARMIN·Filed 2011·Granted Apr 21, 2015·2 cites·24 claims
- 0761US8854603B2Gravitation compensation for optical elements in projection exposure apparatusesMUEHLBERGER NORBERT·Filed 2011·Granted Oct 7, 2014·1 cites·20 claims
- 0858US9513562B2Projection exposure apparatus for microlithography for the production of semiconductor componentsZEISS CARL SMT GMBH·Filed 2014·Granted Dec 6, 2016·0 cites·29 claims
- 0942US9025128B2Actuator including magnet for a projection exposure system and projection exposure system including a magnetWERBER ARMIN·Filed 2011·Granted May 5, 2015·0 cites·33 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →