Inventor · disambiguated record
Yu C. Chow
Also filed as: CHOW YU C · CHOW YU-CHANG
8 granted patents·219 citations·filing 1986–1999
88Inventor score
Top patents by PatentIndex Score
8 records- 0193US4847111APlasma-nitridated self-aligned tungsten system for VLSI interconnectionsHUGHES AIRCRAFT CO·Filed 1988·Granted Jul 11, 1989·88 cites·13 claims
- 0272US4737474ASilicide to silicon bonding processSPECTRUM CVD INC·Filed 1986·Granted Apr 12, 1988·28 cites·8 claims
- 0367US4777061ABlanket tungsten deposition for dielectricSPECTRUM CVD INC·Filed 1987·Granted Oct 11, 1988·24 cites·4 claims
- 0466US4920403ASelective tungsten interconnection for yield enhancementHUGHES AIRCRAFT CO·Filed 1989·Granted Apr 24, 1990·31 cites·16 claims
- 0565US4961822AFully recessed interconnection scheme with titanium-tungsten and selective CVD tungstenLIAO KUAN Y·Filed 1989·Granted Oct 9, 1990·27 cites·20 claims
- 0644US6401728B2Method for cleaning interior of etching chamberUNITED MICROELECTRONICS CORP·Filed 1999·Granted Jun 11, 2002·9 cites·17 claims
- 0739US6374832B2Waferless seasoning processUNITED MICROELECTRONICS CORP·Filed 1999·Granted Apr 23, 2002·12 cites·20 claims
- 0828US6232226B1Method of fabricating barrier layer in integrated circuitUNITED MICROELECTRONICS CORP·Filed 1999·Granted May 15, 2001·0 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →