Inventor · disambiguated record
Norihiko Sasagawa
Also filed as: SASAGAWA NORIHIKO
5 granted patents·19 citations·filing 2004–2018
76Inventor score
Technology areasH10P
Top patents by PatentIndex Score
5 records- 0187US10168618B2Liquid processing method and storage mediumTOKYO ELECTRON LTD·Filed 2015·Granted Jan 1, 2019·5 cites·5 claims
- 0280US9195138B2Liquid processing apparatus, liquid processing method and storage mediumSASAGAWA NORIHIKO·Filed 2011·Granted Nov 24, 2015·7 cites·13 claims
- 0376US10074548B2Chemical liquid discharge mechanism, liquid processing apparatus, chemical liquid discharge method, and storage mediumTOKYO ELECTRON LTD·Filed 2015·Granted Sep 11, 2018·2 cites·17 claims
- 0472US10755952B2Chemical liquid discharge mechanism, liquid processing apparatus, chemical liquid discharge method, and storage mediumTOKYO ELECTRON LTD·Filed 2018·Granted Aug 25, 2020·1 cites·6 claims
- 0550US7326299B2Process liquid supply nozzle, process liquid supply device and nozzle cleaning methodTOKYO ELECTRON LTD·Filed 2004·Granted Feb 5, 2008·4 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →