Inventor · disambiguated record
Huirong Yao
Also filed as: YAO HUIRONG
22 granted patents·5 pending applications·145 citations·filing 2003–2020
94Inventor score
Files withYAO HUIRONG11AZ ELECTRONIC MATERIALS USA4AZ ELECTRONIC MAT (LUXEMBOURG) S A R L3MERCK PATENT GMBH3RAHMAN M DALIL2
Top patents by PatentIndex Score
27 records- 0196US8329387B2Antireflective coating compositionsYAO HUIRONG·Filed 2008·Granted Dec 11, 2012·38 cites·8 claims
- 0292US7638262B2Antireflective composition for photoresistsAZ ELECTRONIC MATERIALS USA·Filed 2006·Granted Dec 29, 2009·19 cites·20 claims
- 0390US8568958B2Underlayer composition and process thereofYAO HUIRONG·Filed 2011·Granted Oct 29, 2013·9 cites·20 claims
- 0490US7470500B2Organic bottom antireflective polymer compositionsAZ ELECTRONIC MATERIALS USA·Filed 2005·Granted Dec 30, 2008·11 cites·15 claims
- 0588US9315636B2Stable metal compounds, their compositions and methodsYAO HUIRONG·Filed 2012·Granted Apr 19, 2016·6 cites·22 claims
- 0688US8465902B2Underlayer coating composition and processes thereofYAO HUIRONG·Filed 2011·Granted Jun 18, 2013·7 cites·20 claims
- 0788US8039201B2Antireflective coating composition and process thereofAZ ELECTRONIC MATERIALS USA·Filed 2007·Granted Oct 18, 2011·11 cites·17 claims
- 0886US9201305B2Spin-on compositions of soluble metal oxide carboxylates and methods of their useRAHMAN M DALIL·Filed 2013·Granted Dec 1, 2015·8 cites·21 claims
- 0985US8507192B2Antireflective compositions and methods of using sameYAO HUIRONG·Filed 2010·Granted Aug 13, 2013·5 cites·15 claims
- 1084US9499698B2Metal hardmask composition and processes for forming fine patterns on semiconductor substratesAZ ELECTRONIC MAT (LUXEMBOURG) S A R L·Filed 2015·Granted Nov 22, 2016·5 cites·20 claims
- 1180US9296922B2Stable metal compounds as hardmasks and filling materials, their compositions and methods of useYAO HUIRONG·Filed 2013·Granted Mar 29, 2016·5 cites·19 claims
- 1275US7030201B2Bottom antireflective coatingsAZ ELECTRONIC MATERIALS USA·Filed 2003·Granted Apr 18, 2006·7 cites·22 claims
- 1373US8486609B2Antireflective coating composition and process thereofRAHMAN M DALIL·Filed 2009·Granted Jul 16, 2013·5 cites·17 claims
- 1472US8221965B2Antireflective coating compositionsYAO HUIRONG·Filed 2008·Granted Jul 17, 2012·6 cites·14 claims
- 1570US8551686B2Antireflective composition for photoresistsYAO HUIRONG·Filed 2009·Granted Oct 8, 2013·1 cites·15 claims
- 1668US9409793B2Spin coatable metallic hard mask compositions and processes thereofAZ ELECTRONIC MAT (LUXEMBOURG) S A R L·Filed 2014·Granted Aug 9, 2016·2 cites·14 claims
- 1757US2014295349A1Bottom antireflective materials and compositionsYAO HUIRONG·Filed 2013·Application pending·0 cites
- 1854US2015227043A1Bottom antireflective materials and compositionsAZ ELECTRONIC MATERIALS LUXEMBOURG SARL·Filed 2015·Application pending·0 cites
- 1953US2021109451A1Spin-on metal oxide materials of high etch resistance useful in image reversal technique and related semiconductor manufacturing processesMERCK PATENT GMBH·Filed 2020·Application pending·0 cites
- 2051US10241409B2Materials containing metal oxides, processes for making same, and processes for using sameAZ ELECTRONIC MAT LUXEMBOURG SARL·Filed 2015·Granted Mar 26, 2019·0 cites·13 claims
- 2149US2009035704A1Underlayer Coating Composition Based on a Crosslinkable PolymerZHUANG HONG·Filed 2007·Application pending·0 cites
- 2248US9418836B2Polyoxometalate and heteropolyoxometalate compositions and methods for their useAZ ELECTRONIC MAT (LUXEMBOURG) S A R L·Filed 2014·Granted Aug 16, 2016·0 cites·5 claims
- 2346US9170494B2Antireflective compositions and methods of using sameYAO HUIRONG·Filed 2012·Granted Oct 27, 2015·0 cites·17 claims
- 2442US11421128B2Composition of spin-on materials containing metal oxide nanoparticles and an organic polymerRIDGEFIELD ACQUISITION·Filed 2017·Granted Aug 23, 2022·0 cites·31 claims
- 2541US11042091B2Spin-on inorganic oxide containing composition useful as hard masks and filling materials with improved thermal stabilityMERCK PATENT GMBH·Filed 2018·Granted Jun 22, 2021·0 cites·22 claims
- 2639US2020002568A1Lithographic compositions and methods of use thereofMERCK PATENT GMBH·Filed 2018·Application pending·0 cites
- 2738US8445181B2Antireflective coating composition and process thereofYAO HUIRONG·Filed 2010·Granted May 21, 2013·0 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →