Inventor · disambiguated record
Henning Backhauss
Also filed as: BACKHAUSS HENNING
12 granted patents·6 pending applications·302 citations·filing 1994–2010
92Inventor score
Files withVISTEC SEMICONDUCTOR SYS GMBH10LEICA MICROSYSTEMS4HAHN KURT1KREH ALBERT1METHODE ELECTRONICS INC1
Top patents by PatentIndex Score
18 records- 0192US5528408ASmall footprint optoelectronic transceiver with laserMETHODE ELECTRONICS INC·Filed 1994·Granted Jun 18, 1996·134 cites·16 claims
- 0286US7460219B2Method for optically inspecting a wafer by sequentially illuminating with bright and dark field light beams wherein the images from the bright and dark field illuminated regions are spatially offsetVISTEC SEMICONDUCTOR SYS GMBH·Filed 2005·Granted Dec 2, 2008·18 cites·17 claims
- 0382US7248354B2Apparatus for inspection of a waferVISTEC SEMICONDUCTOR SYS GMBH·Filed 2004·Granted Jul 24, 2007·21 cites·27 claims
- 0478US5778127AOptical transceiver and filler compositionFiled 1995·Granted Jul 7, 1998·53 cites·21 claims
- 0577US7224446B2Apparatus, method, and computer program for wafer inspectionVISTEC SEMICONDUCTOR SYS GMBH·Filed 2004·Granted May 29, 2007·15 cites·24 claims
- 0676US7477370B2Method of detecting incomplete edge bead removal from a disk-like objectVISTEC SEMICONDUCTOR SYS GMBH·Filed 2006·Granted Jan 13, 2009·6 cites·11 claims
- 0776US7180585B2Apparatus for wafer inspectionLEICA MICROSYSTEMS·Filed 2004·Granted Feb 20, 2007·14 cites·21 claims
- 0875US7327450B2Apparatus for inspection of a waferVISTEC SEMICONDUCTOR SYS GMBH·Filed 2004·Granted Feb 5, 2008·12 cites·23 claims
- 0974US8451440B2Apparatus for the optical inspection of wafersHAHN KURT·Filed 2010·Granted May 28, 2013·4 cites·35 claims
- 1069US7292328B2Method for inspection of a waferVISTEC SEMICONDUCTOR SYS GMBH·Filed 2004·Granted Nov 6, 2007·8 cites·18 claims
- 1166US7265823B2System for the detection of macrodefectsVISTEC SEMICONDUCTOR SYS GMBH·Filed 2004·Granted Sep 4, 2007·14 cites·12 claims
- 1260US7307713B2Apparatus and method for inspection of a waferVISTEC SEMICONDUCTOR SYS GMBH·Filed 2004·Granted Dec 11, 2007·3 cites·20 claims
- 1343US2006262295A1Apparatus and method for inspecting a waferVISTEC SEMICONDUCTOR SYS GMBH·Filed 2006·Application pending·0 cites
- 1443US2005280808A1Method and system for inspecting a waferLEICA MICROSYSTEMS·Filed 2005·Application pending·0 cites
- 1543US2005280807A1Method and system for inspecting a waferLEICA MICROSYSTEMS·Filed 2005·Application pending·0 cites
- 1642US2005122509A1Apparatus for wafer inspectionLEICA MICROSYSTEMS·Filed 2005·Application pending·0 cites
- 1742US2007013902A1Apparatus for Inspecting a WaferVISTEC SEMICONDUCTOR SYS GMBH·Filed 2006·Application pending·0 cites
- 1840US2007064224A1Method and device for inspecting a waferKREH ALBERT·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →