Inventor · disambiguated record
Champion Yi
Also filed as: YI CHAMPION
10 granted patents·1 pending application·287 citations·filing 1996–2002
91Inventor score
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11 records- 0188US6153116AMethod of detecting end point and monitoring uniformity in chemical-mechanical polishing operationPROMOS TECHNOLOGIES INC·Filed 1998·Granted Nov 28, 2000·96 cites·16 claims
- 0284US6432728B1Method for integration optimization by chemical mechanical planarization end-pointing techniquePROMOS TECHNOLOGIES INC·Filed 2000·Granted Aug 13, 2002·43 cites·11 claims
- 0377US6461226B1Chemical mechanical polishing of a metal layer using a composite polishing padPROMOS TECHNOLOGIES INC·Filed 2000·Granted Oct 8, 2002·22 cites·20 claims
- 0468US6227949B1Two-slurry CMP polishing with different particle size abrasivesPROMOS TECHNOLOGIES INC·Filed 1999·Granted May 8, 2001·30 cites·5 claims
- 0562US5776833AMethod for forming metal plugMOSEL VITELIC INC·Filed 1996·Granted Jul 7, 1998·32 cites·22 claims
- 0660US6146260APolishing machinePROMOS TECHNOLOGY INC·Filed 1998·Granted Nov 14, 2000·21 cites·7 claims
- 0755US6130163AStabilization of slurry used in chemical mechanical polishing of semiconductor wafers by adjustment of PH of deionized waterPROMOS TECHNOLOGIES INC·Filed 1999·Granted Oct 10, 2000·17 cites·3 claims
- 0848US6780092B2Polishing tool used for CMPPROMOS TECHNOLOGIES INC·Filed 2002·Granted Aug 24, 2004·3 cites·17 claims
- 0944US6238279B1Magnetic filtration for slurry used in chemical mechanical polishing of semiconductor wafersPROMOS TECHNOLOGIES INC·Filed 1999·Granted May 29, 2001·15 cites·7 claims
- 1038US6053802AStabilization of slurry used in chemical mechanical polishing of semiconductor wafers by megasonic pulsePROMOS TECHNOLOGIES INC·Filed 1999·Granted Apr 25, 2000·8 cites·4 claims
- 1135US2003044529A1Method of depositing thin filmFiled 2001·Application pending·0 cites
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