Inventor · disambiguated record
Tsuneo Okubo
Also filed as: OKUBO TSUNEO
5 granted patents·68 citations·filing 1975–1982
81Inventor score
Top patents by PatentIndex Score
5 records- 0182US4443703AMethod and apparatus of deflection calibration for a charged particle beam exposure apparatusNIPPON TELEGRAPH & TELEPHONE·Filed 1982·Granted Apr 17, 1984·23 cites·8 claims
- 0265US4286154AMethod of detecting a mark by an electron beam and an apparatus thereforHITACHI LTD·Filed 1979·Granted Aug 25, 1981·10 cites·14 claims
- 0356US4336597AMethod and system for measuring the diameter of an electron beamNIPPON TELEGRAPH & TELEPHONE·Filed 1980·Granted Jun 22, 1982·20 cites·9 claims
- 0444US4489241AExposure method with electron beam exposure apparatusHITACHI LTD·Filed 1982·Granted Dec 18, 1984·12 cites·13 claims
- 0528US3983097AMethod of producing high molecular derivativesOKUBO TSUNEO·Filed 1975·Granted Sep 28, 1976·3 cites·3 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →