Inventor · disambiguated record
Yugo Shibata
Also filed as: SHIBATA YUGO
11 granted patents·64 citations·filing 2003–2014
88Inventor score
Top patents by PatentIndex Score
11 records- 0194US8031328B2Positioning apparatusCANON KK·Filed 2006·Granted Oct 4, 2011·28 cites·2 claims
- 0280US7330093B2Alignment apparatus, exposure apparatus, and device manufacturing methodCANON KK·Filed 2005·Granted Feb 12, 2008·10 cites·11 claims
- 0376US7282874B2Alignment apparatus, exposure apparatus, and device manufacturing methodCANON KK·Filed 2006·Granted Oct 16, 2007·8 cites·11 claims
- 0466US7932646B2Exposure apparatus with a stage, driving unit,and force applying unit having a separate magnetic shieldCANON KK·Filed 2008·Granted Apr 26, 2011·4 cites·5 claims
- 0563US7880864B2Stage apparatus, exposure apparatus, and device manufacturing methodCANON KK·Filed 2007·Granted Feb 1, 2011·2 cites·9 claims
- 0662US7193493B2Alignment apparatus, exposure apparatus, and device manufacturing methodCANON KK·Filed 2003·Granted Mar 20, 2007·8 cites·13 claims
- 0760US7375346B2Positioning device and method of initializing a positioning deviceCANON KK·Filed 2006·Granted May 20, 2008·2 cites·9 claims
- 0859US7157722B2Positioning device and method of initializing a positioning deviceCANON KK·Filed 2005·Granted Jan 2, 2007·2 cites·3 claims
- 0950US8786831B2Positioning apparatusASANO TOSIYA·Filed 2011·Granted Jul 22, 2014·0 cites·2 claims
- 1049US9791018B2Vibration isolation apparatus, method of isolating vibration, lithography apparatus, and method of producing deviceCANON KK·Filed 2014·Granted Oct 17, 2017·0 cites·9 claims
- 1146US7804207B2Positioning apparatus, exposure apparatus, and device manufacturing method using repulsion force generationCANON KK·Filed 2007·Granted Sep 28, 2010·0 cites·2 claims
Join the waitlist — get patent alerts
Get an alert when Yugo Shibata files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →