Inventor · disambiguated record
Chok W. Ho
Also filed as: HO CHOK · HO CHOK W · HO CHOK WAH
6 granted patents·2 pending applications·92 citations·filing 2000–2017
83Inventor score
Top patents by PatentIndex Score
8 records- 0179US6777344B2Post-etch photoresist strip with O2 and NH3 for organosilicate glass low-K dielectric etch applicationsLAM RES CORP·Filed 2001·Granted Aug 17, 2004·25 cites·13 claims
- 0278US6486070B1Ultra-high oxide to photoresist selective etch of high-aspect-ratio openings in a low-pressure, high-density plasmaLAM RES CORP·Filed 2000·Granted Nov 26, 2002·26 cites·15 claims
- 0376US6620733B2Use of hydrocarbon addition for the elimination of micromasking during etching of organic low-k dielectricsLAM RES CORP·Filed 2001·Granted Sep 16, 2003·24 cites·6 claims
- 0471US6893969B2Use of ammonia for etching organic low-k dielectricsLAM RES CORP·Filed 2001·Granted May 17, 2005·14 cites·21 claims
- 0561US8308962B2Etching processes used in MEMS productionFLOYD PHILIP·Filed 2008·Granted Nov 13, 2012·2 cites·15 claims
- 0645US7105454B2Use of ammonia for etching organic low-k dielectricsLAM RES CORP·Filed 2004·Granted Sep 12, 2006·1 cites·18 claims
- 0737US2013113810A1Sidewall spacers along conductive linesHO CHOK WAH·Filed 2011·Application pending·0 cites
- 0831US2018254239A1FORMING METAL CAP LAYER OVER THROUGH-GLASS-VIAS (TGVs)GLOBALFOUNDRIES INC·Filed 2017·Application pending·0 cites
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