Inventor · disambiguated record
Kyeong-Joon Ahn
Also filed as: AHN KYEONG-JOON
1 granted patent·1 pending application·426 citations·filing 2006–2011
59Inventor score
Technology areasC23C
Files withUNIV SUNGKYUNKWAN FOUND2
Top patents by PatentIndex Score
2 records- 0195US7919142B2Atomic layer deposition apparatus using neutral beam and method of depositing atomic layer using the sameUNIV SUNGKYUNKWAN FOUND·Filed 2006·Granted Apr 5, 2011·426 cites·9 claims
- 0256US2011162581A1Atomic layer deposition apparatus using neutral beam and method of depositing atomic layer using the sameUNIV SUNGKYUNKWAN FOUND·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →