Inventor · disambiguated record
Franklin Mark Schellenberg
Also filed as: SCHELLENBERG FRANKLIN M · SCHELLENBERG FRANKLIN MARK
33 granted patents·2 pending applications·593 citations·filing 1987–2024
97Inventor score
Files withSCHELLENBERG FRANKLIN MARK18IBM5ZHUANGZI LI AND ASS3UNIV LELAND STANFORD JUNIOR2GRANIK YURI1
Top patents by PatentIndex Score
35 records- 0195US4791631AWide tolerance, modulated blue laser sourceIBM·Filed 1987·Granted Dec 13, 1988·74 cites·34 claims
- 0294US6643616B1Integrated device structure prediction based on model curvatureFiled 1999·Granted Nov 4, 2003·100 cites·6 claims
- 0392US9160847B2Visual translation for an IVR systemLI ZHUANGZI·Filed 2014·Granted Oct 13, 2015·10 cites·16 claims
- 0491US11336768B2Visual translation for telephone commandsZHUANGZI LI AND ASS·Filed 2021·Granted May 17, 2022·2 cites·4 claims
- 0591US6728946B1Method and apparatus for creating photolithographic masksFiled 2000·Granted Apr 27, 2004·41 cites·26 claims
- 0690US11269258B2Method and system for nanoscale data recordingSCHELLENBERG FRANKLIN MARK·Filed 2020·Granted Mar 8, 2022·1 cites·10 claims
- 0790US2024248407A1Method and system for nanoscale data recordingSCHELLENBERG FRANKLIN MARK·Filed 2024·Application pending·0 cites
- 0889US10884340B2Method and system for nanoscale data recordingSCHELLENBERG FRANKLIN MARK·Filed 2020·Granted Jan 5, 2021·1 cites·20 claims
- 0989US6778695B1Design-based reticle defect prioritizationFiled 1999·Granted Aug 17, 2004·74 cites·9 claims
- 1088US11012561B2Visual translation for an IVR systemZHUANGZI LI AND ASS·Filed 2020·Granted May 18, 2021·3 cites·5 claims
- 1188US5105298ABirefringent structures formed by photo-exposure of polymer films and method for fabrication thereofUNIV LELAND STANFORD JUNIOR·Filed 1989·Granted Apr 14, 1992·59 cites·3 claims
- 1287US8507881B2Nanolithography systemSCHELLENBERG FRANKLIN MARK·Filed 2011·Granted Aug 13, 2013·4 cites·7 claims
- 1387US7586583B2Nanolithography systemSCHELLENBERG FRANKLIN MARK·Filed 2006·Granted Sep 8, 2009·3 cites·6 claims
- 1487US7172838B2Chromeless phase mask layout generationMAURER WILHELM·Filed 2002·Granted Feb 6, 2007·49 cites·51 claims
- 1586US9891536B2System for creating nanoscale patternsSCHELLENBERG FRANKLIN MARK·Filed 2016·Granted Feb 13, 2018·1 cites·5 claims
- 1683US11886123B2Method and system for nanoscale data recordingSCHELLENBERG FRANKLIN MARK·Filed 2022·Granted Jan 30, 2024·0 cites·10 claims
- 1782US5161039ABirefringent structures formed by photo-exposure of polymer films and method for fabrication thereofUNIV LELAND STANFORD JUNIOR·Filed 1991·Granted Nov 3, 1992·56 cites·22 claims
- 1881US7392168B2Method of compensating for etch effects in photolithographic processingGRANIK YURI·Filed 2001·Granted Jun 24, 2008·19 cites·24 claims
- 1980US9442382B2Super-resolution exposure systemSCHELLENBERG FRANKLIN MARK·Filed 2016·Granted Sep 13, 2016·1 cites·5 claims
- 2076US10747118B2Method and system for nanoscale data recordingSCHELLENBERG FRANKLIN MARK·Filed 2020·Granted Aug 18, 2020·0 cites·20 claims
- 2176US5362584APhase-shifting transparent lithographic mask for writing contiguous structures from noncontiguous mask areasIBM·Filed 1993·Granted Nov 8, 1994·34 cites·6 claims
- 2275US10191385B2Nanoscale pattern exposure systemSCHELLENBERG FRANKLIN MARK·Filed 2018·Granted Jan 29, 2019·0 cites·19 claims
- 2375US7174531B2Creating photolithographic masksSCHELLENBERG FRANKLIN M·Filed 2004·Granted Feb 6, 2007·14 cites·31 claims
- 2473US9128380B2Method and system for nanopatterningSCHELLENBERG FRANKLIN MARK·Filed 2014·Granted Sep 8, 2015·0 cites·22 claims
- 2572US10539880B2Method and system for nanoscale data recordingSCHELLENBERG FRANKLIN MARK·Filed 2019·Granted Jan 21, 2020·0 cites·19 claims
- 2672US9229330B2Method for writing nanoscale patternsSCHELLENBERG FRANKLIN MARK·Filed 2014·Granted Jan 5, 2016·0 cites·17 claims
- 2770US6159641AMethod for the repair of defects in lithographic masksIBM·Filed 1993·Granted Dec 12, 2000·21 cites·9 claims
- 2869US8710463B1Illuminating waveguide fabrication methodSCHELLENBERG FRANKLIN MARK·Filed 2013·Granted Apr 29, 2014·0 cites·10 claims
- 2968US8507880B2Illuminating waveguide fabrication methodSCHELLENBERG FRANKLIN MARK·Filed 2012·Granted Aug 13, 2013·0 cites·20 claims
- 3066US8193519B2Illuminating waveguide fabrication methodSCHELLENBERG FRANKLIN MARK·Filed 2009·Granted Jun 5, 2012·0 cites·8 claims
- 3166US7989783B2Nanolithography systemSCHELLENBERG FRANKLIN MARK·Filed 2009·Granted Aug 2, 2011·0 cites·6 claims
- 3265US8841637B2Method for nanolithographySCHELLENBERG FRANKLIN MARK·Filed 2013·Granted Sep 23, 2014·0 cites·18 claims
- 3365US2025016268A1Language translation for smartphone applicationsZHUANGZI LI AND ASS·Filed 2024·Application pending·0 cites
- 3464US5031993ADetecting polarization state of an optical wavefrontIBM·Filed 1989·Granted Jul 16, 1991·14 cites·19 claims
- 3545US5547705ANonlinear optical device and method of manufacturing sameIBM·Filed 1992·Granted Aug 20, 1996·12 cites·16 claims
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