Inventor · disambiguated record
Maikel Adrianus Cornelis Schepers
Also filed as: SCHEPERS MAIKEL ADRIANUS CORNELIS
5 granted patents·2 pending applications·19 citations·filing 2009–2012
72Inventor score
Files withASML NETHERLANDS BV2DIRECKS DANIEL JOZEF MARIA2PHILIPS DANNY MARIA HUBERTUS2SCHEPERS MAIKEL ADRIANUS CORNELIS1
Top patents by PatentIndex Score
7 records- 0187US8421993B2Fluid handling structure, lithographic apparatus and device manufacturing methodDIRECKS DANIEL JOZEF MARIA·Filed 2009·Granted Apr 16, 2013·14 cites·20 claims
- 0269US8680493B2Radiation conduit for radiation sourceSCHEPERS MAIKEL ADRIANUS CORNELIS·Filed 2012·Granted Mar 25, 2014·3 cites·13 claims
- 0362US8638417B2Fluid handling structure, lithographic apparatus and a device manufacturing methodPHILIPS DANNY MARIA HUBERTUS·Filed 2011·Granted Jan 28, 2014·1 cites·25 claims
- 0461US8405815B2Fluid handling structure, lithographic apparatus and device manufacturing methodPHILIPS DANNY MARIA HUBERTUS·Filed 2010·Granted Mar 26, 2013·1 cites·20 claims
- 0544US2010060868A1Fluid handling structure, lithographic apparatus and device manufactuirng methodASML NETHERLANDS BV·Filed 2009·Application pending·0 cites
- 0639US9618835B2Lithographic apparatus and a device manufacturing method involving an elongate liquid supply opening or an elongate region of relatively high pressureDIRECKS DANIEL JOZEF MARIA·Filed 2011·Granted Apr 11, 2017·0 cites·20 claims
- 0736US2011007286A1Lithographic apparatus, a method of controlling the apparatus and a method of manufacturing a device using a lithographic apparatusASML NETHERLANDS BV·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →