Inventor · disambiguated record
Masaei Suwada
Also filed as: SUWADA MASAEI
15 granted patents·7 pending applications·4,786 citations·filing 1999–2025
96Inventor score
Top patents by PatentIndex Score
22 records- 0199US8041450B2Position sensor system for substrate transfer robotASM JAPAN·Filed 2007·Granted Oct 18, 2011·531 cites·26 claims
- 0299US7021881B2Semiconductor processing apparatus comprising chamber partitioned into reaction and transfer sectionsASM JAPAN·Filed 2004·Granted Apr 4, 2006·545 cites·31 claims
- 0399US6899507B2Semiconductor processing apparatus comprising chamber partitioned into reaction and transfer sectionsASM JAPAN·Filed 2002·Granted May 31, 2005·561 cites·15 claims
- 0499US6662817B2Gas-line system for semiconductor-manufacturing apparatusASM JAPAN·Filed 2001·Granted Dec 16, 2003·496 cites·20 claims
- 0598US7963736B2Wafer processing apparatus with wafer alignment deviceASM JAPAN·Filed 2008·Granted Jun 21, 2011·539 cites·16 claims
- 0698US7618226B2Semiconductor substrate transfer apparatus and semiconductor substrate processing apparatus equipped with the sameASM JAPAN·Filed 2006·Granted Nov 17, 2009·538 cites·18 claims
- 0797US9793148B2Method for positioning wafers in multiple wafer transportYAMAGISHI TAKAYUKI·Filed 2011·Granted Oct 17, 2017·468 cites·2 claims
- 0896US9349620B2Apparatus and method for pre-baking substrate upstream of process chamberASM IP HOLDING BV·Filed 2014·Granted May 24, 2016·472 cites·20 claims
- 0995US6305898B1Wafer transfer mechanismASM JAPAN·Filed 1999·Granted Oct 23, 2001·567 cites·12 claims
- 1093US10403514B1Substrate transporting system, storage medium and substrate transporting methodASM IP HOLDING BV·Filed 2018·Granted Sep 3, 2019·8 cites·10 claims
- 1191US6630053B2Semiconductor processing module and apparatusASM JAPAN·Filed 2001·Granted Oct 7, 2003·55 cites·28 claims
- 1271US11247330B2Method for teaching a transportation position and alignment jigASM IP HOLDING BV·Filed 2018·Granted Feb 15, 2022·1 cites·11 claims
- 1357US6945746B2Semiconductor manufacturing equipment and maintenance methodASM JAPAN·Filed 2003·Granted Sep 20, 2005·5 cites·10 claims
- 1457US2023332791A1Interface module having fan filter unitASM IP HOLDING BV·Filed 2023·Application pending·0 cites
- 1557US2025207862A1Apparatus for thermal control of a waferASM IP HOLDINGS B V·Filed 2024·Application pending·0 cites
- 1655US2025201613A1Substrate transfer arm and apparatus using the sameASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 1754US2023022174A1Substrate transfer system with lamp heater, chamber purge methodASM IP HOLDING BV·Filed 2022·Application pending·0 cites
- 1853US2025069920A1Load lock arrangements, semiconductor processing systems including load lock arrangements, and associated methods for regulating the temperature of substrates within load lock arrangementsASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 1951US2024213058A1Load lock arrangements, associated temperature control assemblies, and semiconductor processing systems including load lock arrangements and temperature control assembliesASM IP HOLDING BV·Filed 2023·Application pending·0 cites
- 2044US8758514B2Cluster type semiconductor processing apparatusTAKIZAWA MASAHIRO·Filed 2007·Granted Jun 24, 2014·0 cites·13 claims
- 2143US2025276858A1End effector and substrate processing system using the sameASM IP HOLDING BV·Filed 2025·Application pending·0 cites
- 2235USD1106977SEnd effectorASM IP HOLDING BV·Filed 2023·Granted Dec 23, 2025·0 cites·1 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →