Inventor · disambiguated record
Guido Hergenhan
Also filed as: HERGENHAN GUIDO
21 granted patents·2 pending applications·165 citations·filing 2001–2022
95Inventor score
Files withXTREME TECH GMBH17JENOPTIK OPTICAL SYS GMBH2ASML NETHERLANDS BV1DEUTSCH ZENTR LUFT & RAUMFAHRT1HERGENHAN GUIDO1
Top patents by PatentIndex Score
23 records- 0181US7649187B2Arrangement for the generation of extreme ultraviolet radiation by means of electric discharge at electrodes which can be regeneratedXTREME TECH GMBH·Filed 2007·Granted Jan 19, 2010·7 cites·29 claims
- 0280US7250621B2Method and arrangement for the plasma-based generation of intensive short-wavelength radiationXTREME TECH GMBH·Filed 2005·Granted Jul 31, 2007·17 cites·34 claims
- 0378US8154000B2Arrangement for the continuous generation of liquid tin as emitter material in EUV radiation sourcesHERGENHAN GUIDO·Filed 2010·Granted Apr 10, 2012·13 cites·23 claims
- 0478US7161163B2Method and arrangement for the plasma-based generation of soft x-radiationXTREME TECH GMBH·Filed 2005·Granted Jan 9, 2007·14 cites·26 claims
- 0577US6995382B2Arrangement for the generation of intensive short-wave radiation based on a plasmaXTREME TECH GMBH·Filed 2004·Granted Feb 7, 2006·22 cites·28 claims
- 0676US7233013B2Radiation source for the generation of short-wavelength radiationXTREME TECH GMBH·Filed 2006·Granted Jun 19, 2007·12 cites·9 claims
- 0775US7372057B2Arrangement for providing a reproducible target flow for the energy beam-induced generation of short-wavelength electromagnetic radiationXTREME TECH GMBH·Filed 2005·Granted May 13, 2008·12 cites·25 claims
- 0873US7405413B2Arrangement for providing target material for the generation of short-wavelength electromagnetic radiationXTREME TECH GMBH·Filed 2005·Granted Jul 29, 2008·10 cites·24 claims
- 0971US7368742B2Arrangement and method for metering target material for the generation of short-wavelength electromagnetic radiationXTREME TECH GMBH·Filed 2005·Granted May 6, 2008·10 cites·33 claims
- 1070US7531820B2Arrangement and method for the generation of extreme ultraviolet radiationXTREME TECH GMBH·Filed 2006·Granted May 12, 2009·8 cites·26 claims
- 1169US11712753B2Method for making a thermally stable connection between a glass element and a support element, method for producing an optical device, and optical deviceJENOPTIK OPTICAL SYS GMBH·Filed 2021·Granted Aug 1, 2023·0 cites·14 claims
- 1266US7122814B2Arrangement for the stabilization of the radiation emission of a plasmaXTREME TECH GMBH·Filed 2004·Granted Oct 17, 2006·11 cites·27 claims
- 1364US7218651B2Arrangement for the generation of a pulsed laser beam of high average outputXTREME TECH GMBH·Filed 2005·Granted May 15, 2007·2 cites·16 claims
- 1461US12338183B2Method for integrally bonding a glass element to a support element, and optical deviceJENOPTIK OPTICAL SYS GMBH·Filed 2022·Granted Jun 24, 2025·0 cites·14 claims
- 1560US6570896B2Laser radiation source and process for generating a coherent total laser radiation fieldDEUTSCH ZENTR LUFT & RAUMFAHRT·Filed 2001·Granted May 27, 2003·7 cites·46 claims
- 1659US7800086B2Arrangement for radiation generation by means of a gas dischargeXTREME TECH GMBH·Filed 2006·Granted Sep 21, 2010·5 cites·24 claims
- 1758US7274030B2Apparatus for the temporally stable generation of EUV radiation by means of a laser-induced plasmaXTREME TECH GMBH·Filed 2005·Granted Sep 25, 2007·4 cites·25 claims
- 1852US7477673B2Arrangement for generating extreme ultraviolet radiation based on an electrically operated gas dischargeXTREME TECH GMBH·Filed 2007·Granted Jan 13, 2009·4 cites·19 claims
- 1950US7812542B2Arrangement and method for the generation of extreme ultraviolet radiation by means of an electrically operated gas dischargeXTREME TECH GMBH·Filed 2008·Granted Oct 12, 2010·3 cites·27 claims
- 2049US8008595B2Arrangement for generating extreme ultraviolet radiation by means of an electrically operated gas dischargeXTREME TECH GMBH·Filed 2007·Granted Aug 30, 2011·2 cites·18 claims
- 2146US6947227B2Positioning deviceMILASYS GBR·Filed 2003·Granted Sep 20, 2005·2 cites·20 claims
- 2234US2006226377A1Plasma radiation sourceXTREME TECH GMBH·Filed 2006·Application pending·0 cites
- 2331US2018299792A1Filter, method of formation thereof, and image sensorASML NETHERLANDS BV·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →