Inventor · disambiguated record
Yasunori Yokoya
Also filed as: YOKOYA YASUNORI
3 granted patents·40 citations·filing 1996–2012
69Inventor score
Technology areasG03F
Top patents by PatentIndex Score
3 records- 0187US8802334B2Surface treatment method for a mask blank, method of manufacturing a mask blank, and method of manufacturing a maskYAMADA TAKEYUKI·Filed 2012·Granted Aug 12, 2014·7 cites·18 claims
- 0266US5723237AMethod for determining baking conditions for resist pattern formation through development of unexposed trial resist filmsHOYA CORP·Filed 1996·Granted Mar 3, 1998·31 cites·23 claims
- 0348US7713663B2Mask blank, manufacturing method of mask blank, manufacturing method of transfer mask and manufacturing method of semiconductor deviceHOYA CORP·Filed 2004·Granted May 11, 2010·2 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →