Inventor · disambiguated record
Pablo I. Rovira
Also filed as: ROVIRA PABLO · ROVIRA PABLO I
15 granted patents·519 citations·filing 2000–2020
94Inventor score
Top patents by PatentIndex Score
15 records- 0196US7372565B1Spectrometer measurement of diffracting structuresNANOMETRICS INC·Filed 2006·Granted May 13, 2008·46 cites·24 claims
- 0296US6522406B1Correcting the system polarization sensitivity of a metrology tool having a rotatable polarizerNANOMETRICS INC·Filed 2001·Granted Feb 18, 2003·119 cites·16 claims
- 0394US6856384B1Optical metrology system with combined interferometer and ellipsometerNANOMETRICS INC·Filed 2001·Granted Feb 15, 2005·85 cites·25 claims
- 0493US6713753B1Combination of normal and oblique incidence polarimetry for the characterization of gratingsNANOMETRICS INC·Filed 2001·Granted Mar 30, 2004·66 cites·20 claims
- 0592US7115858B1Apparatus and method for the measurement of diffracting structuresNANOMETRICS INC·Filed 2000·Granted Oct 3, 2006·55 cites·16 claims
- 0691US6665070B1Alignment of a rotatable polarizer with a sampleNANOMETRICS INC·Filed 2001·Granted Dec 16, 2003·40 cites·27 claims
- 0788US7061613B1Polarizing beam splitter and dual detector calibration of metrology device having a spatial phase modulationNANOMETRICS INC·Filed 2004·Granted Jun 13, 2006·35 cites·24 claims
- 0887US7064828B1Pulsed spectroscopy with spatially variable polarization modulation elementNANOMETRICS INC·Filed 2001·Granted Jun 20, 2006·33 cites·16 claims
- 0986US10139352B2Measurement of small box size targetsKLA TENCOR CORP·Filed 2015·Granted Nov 27, 2018·3 cites·20 claims
- 1082US8427645B2Mueller matrix spectroscopy using chiropticVAGOS PEDRO·Filed 2011·Granted Apr 23, 2013·7 cites·15 claims
- 1181US10663392B2Variable aperture maskKLA TENCOR CORP·Filed 2018·Granted May 26, 2020·1 cites·10 claims
- 1276US8825444B1Automated system check for metrology unitROVIRA PABLO I·Filed 2009·Granted Sep 2, 2014·12 cites·7 claims
- 1371US7173417B1Eddy current sensor with concentric confocal distance sensorNANOMETRICS INC·Filed 2003·Granted Feb 6, 2007·17 cites·10 claims
- 1468US11268901B2Variable aperture maskKLA CORP·Filed 2020·Granted Mar 8, 2022·0 cites·11 claims
- 1555US11562289B2Loosely-coupled inspection and metrology system for high-volume production process monitoringKLA TENCOR CORP·Filed 2019·Granted Jan 24, 2023·0 cites·37 claims
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