Inventor · disambiguated record
Kouji Takuma
Also filed as: TAKUMA KOUJI
6 granted patents·9 citations·filing 2010–2019
70Inventor score
Technology areasH10P
Top patents by PatentIndex Score
6 records- 0172US8509937B2Processing apparatus and operating method thereforTAKUMA KOUJI·Filed 2010·Granted Aug 13, 2013·6 cites·14 claims
- 0271US8447422B2Substrate processing apparatus, substrate processing method, and storage mediumYOSHIDA MASAHIRO·Filed 2010·Granted May 21, 2013·3 cites·10 claims
- 0342US11043399B2Substrate processing apparatus and operation method of substrate processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Jun 22, 2021·0 cites·19 claims
- 0436US11062930B2Substrate processing device and substrate conveying methodTOKYO ELECTRON LTD·Filed 2018·Granted Jul 13, 2021·0 cites·10 claims
- 0533US11282719B2Substrate processing apparatus, substrate processing method and recording medium of performing liquid exchange processing according to liquid exchange conditionTOKYO ELECTRON LTD·Filed 2019·Granted Mar 22, 2022·0 cites·10 claims
- 0626US10043692B2Substrate processing apparatus, substrate transport method, and computer-readable recording medium with stored substrate transport programTOKYO ELECTRONICS LTD·Filed 2016·Granted Aug 7, 2018·0 cites·20 claims
Join the waitlist — get patent alerts
Get an alert when Kouji Takuma files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →