Inventor · disambiguated record
Vassilis Panayotis Vourloumis
Also filed as: VOURLOUMIS VASSILIS PANAYOTIS
2 granted patents·1 pending application·31 citations·filing 2006–2008
62Inventor score
Technology areasH01J
Files withVARIAN SEMICONDUCTOR EQUIPMENT3
Top patents by PatentIndex Score
3 records- 0193US7453059B2Technique for monitoring and controlling a plasma processVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Nov 18, 2008·21 cites·31 claims
- 0285US7476849B2Technique for monitoring and controlling a plasma processVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Granted Jan 13, 2009·10 cites·21 claims
- 0359US2009283670A1Technique for Monitoring and Controlling A PLasma ProcessVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2008·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →